반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)
- 제2권1호
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- Pages.21-24
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- 2003
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- 1738-2270(pISSN)
폐슬러지를 이용한 SiC 합성에 관한 열역학적 고찰
Thermodynamic Consideration for SiC synthesis by Using Sludged Silicon Powder
초록
Sludged silicon powders that are generated during silicon ingot slicing process have potential usage as silicon source in fabricating silicon carbide powders by adding carbon. A thermodynamic calculation is performed to consider a plausible formation condition for the silicon carbide powders. A thin silicon oxide layer around silicon powder is sufficient to supply equilibrium oxygen partial pressure at the formation temperature(