반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)
- 제2권1호
- /
- Pages.11-14
- /
- 2003
- /
- 1738-2270(pISSN)
High Performance On-Chip Integrable Inductor for RF Applications
- Lee, J.Y. (School of electrical engineering, Seoul National University) ;
- Kim, J.H. (School of electrical engineering, Seoul National University) ;
- Kim, M.J. (School of electrical engineering, Seoul National University) ;
- Moon, S.S. (School of electrical engineering, Seoul National University) ;
- Kim, I.H. (School of electrical engineering, Seoul National University) ;
- Lee, Y.H. (School of electrical engineering, Yonsei University) ;
- Yook, Jong-Gwan (School of electrical engineering, Yonsei University) ;
- Kukjin Chun (School of electrical engineering, Seoul National University)
- 발행 : 2003.03.01
초록
The high Q(quality factor) suspended spiral inductors were fabricated on the silicon substrate by 3D surface micromachined process. The integration of 2.4GHz VCO has been performed by fabricating suspended spiral inductor of the top of CMOS VCO circuit. The phase noise of VCO integrated MEMS inductor is 93.5 dBc/Hz at 100kHz of offset frequency.