Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Development and Application of Rotating Compensator Spectroscopic Ellipsometer

Rotating Compensator Spectroscopic Ellipsometer의 개발 및 응용

  • 이재호 (한양대학교 응용물리학과) ;
  • 방경윤 (한양대학교 응용물리학과) ;
  • 박준택 (한양대학교 응용물리학과) ;
  • 오혜근 (한양대학교 응용물리학과) ;
  • 안일신 (한양대학교 응용물리학과)
  • Published : 2003.06.01
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Abstract

We have developed a rotating compensator spectroscopic ellipsometer (RCSE). As the ellipsometry measures a change in the polarization state of a light wave upon non-normal reflection from surface, the degree of sensitivity is enhanced greatly through the detection of relative phase change. RCSE acquires additional information from the non-ideal surface of sample and operates over the photon energy range from 1.5 to 4.5 eV. We applied RCSE to measure the optical properties of films and the line-width of patterned PR films on crystalline silicon.

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