한국레이저가공학회지 (Laser Solutions)
- 제6권3호
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- Pages.19-28
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- 2003
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- 1229-0963(pISSN)
마이크로 금형 제작을 위한 PET의 엑시머 레이저 어블레이션 - 퓨리에 광학을 이용한 가공 단면 형상의 제어 -
The excimer laser ablation of PET for micro-mold insert - The control of cross sectional shape using Fourier optics -
- Shin, Dong-Sik (Laser Application Group, Korea Institute of Machinery & Materials) ;
- Lee, Je-Hoon (Laser Application Group, Korea Institute of Machinery & Materials) ;
- Seo, Jung (Laser Application Group, Korea Institute of Machinery & Materials) ;
- Kim, Do-Hoon (Dept. of Metallugical System Engineering, Yonsei University)
- 발행 : 2003.12.01
초록
The manufacturing process for the microfluidic device can include sequential steps such as master fabrication, electroforming, and injection molding. The laser ablation, using masks, has been applied to the fabrication of channels in microfluidic devices. In this research, an excimer laser was used to engrave microscopic channels on the surface of PET (polyethylene terephthalate), which shows a high absorption ratio for an excimer laser beam with a wavelength of 248 m. When 50-
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