Laser Solutions (한국레이저가공학회지)
- Volume 6 Issue 3
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- Pages.11-17
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- 2003
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- 1229-0963(pISSN)
Measurement and analysis of recoil force during Nd-YAG laser ablation of silicon
Nd-YAG 펄스레이저에 의한 실리콘 가공시 발생하는 증발반동압력 측정 및 분석
Abstract
Recoil force exerted on the substrate during a nanosecond laser ablation of silicon is measured. The ablation sample is placed at the end of a 400