Journal of Korean Vacuum Science & Technology
- 제7권1호
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- Pages.23-26
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- 2003
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- 1226-6167(pISSN)
Formation of Neutral Beam by Low Angle Reflection
- Lee, Do-Haing (Department of Materials Engineering, Sungkyunkwan University) ;
- Jung, Min-Jae (Department of Materials Engineering, Sungkyunkwan University) ;
- Bae, Jung-Woon (Department of Materials Engineering, Sungkyunkwan University) ;
- Kim, Sung-Jin (Department of Electrical Engineering, Pohang University of Science and Technology) ;
- Lee, Jae-Koo (Department of Electrical Engineering, Pohang University of Science and Technology) ;
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Yeom, Geun-Young
(Department of Materials Engineering, Sungkyunkwan University)
- 발행 : 2003.06.01
초록
In this study, a neutral beam was formed using a low angle forward reflection of the ion beam and its degree of neutralization at different reflection angles was investigated. When the ion beam was reflected by a reflector at the angles lower than 15