소성∙가공 (Transactions of Materials Processing)

  • 제12권7호
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  • Pages.623-630
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  • 2003
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  • 1225-696X(pISSN)
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  • 2287-6359(eISSN)
한국소성∙가공학회 (The Korean Society for Technology of Plasticity and materials processing)
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기계화학적 반응을 고려한 단결정 실리콘과 비정질 보로실리케이트의 나노 변형 거동에 관한 연구

A Study on the Nano-Deformation Behaviors of Single Crystal Silicon and Amorphous Borosilicate Considering the Mechanochemical Reaction

  • 윤성원 (부산대 정밀기계공학과 대학원) ;
  • 신용래 (부산대 정밀기계공학과 대학원) ;
  • 강충길 (부산대 기계공학부)
  • 발행 : 2003.11.01
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초록

Nanomachining process, static nanoplowing, is one of the most promising lithographic technologies in terms of the low cost of operation and variety of workable materials. In nanomachining process, chemical effects are more dominant factor compared with those by physical deformation or fracture. For example, during the nanoscratch on a silicon surface in the atmosphere, micro protuberances are formed due to the mechanochemical reaction between diamond tip and the surfaces. On the contrary, in case of chemically stable materials, such as ceramic or glass, surface protuberances are not formed. The purpose of this study is to understand effects of the mechanochemical reaction between tip and surfaces on deformation behaviors of hard-brittle materials. Nanometerscale elasoplastic deformation behavior of single crystal silicon (100) was characterized with micro protuberance phenomena, and compared with that of borosilicate (Pyrex glass 7740). In addition, effects of the silicon protuberances on nanoscratch test results were discussed.

키워드

참고문헌

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피인용 문헌

  1. Properties of Polysiloxane Coated Borosilicate Lining Blocks vol.54, pp.6, 2017, https://doi.org/10.4191/kcers.2017.54.6.06