KIEE International Transactions on Electrophysics and Applications

대한전기학회 (The Korean Institute of Electrical Engineers)
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Three-Dimensional Self-Assembled Micro-Array Using Magnetic Force Interaction

  • Park, Yong-Sung (School of Electrical, Electronic and Information Engineering, Wonkwang University) ;
  • Kwon, Young-Soo (Div. Of Electrical, Electronic and Computer Engineering, Dong-A University) ;
  • Eiichi Tamiya (School of Materials Science, Japan Advanced Institute of Science and Technology) ;
  • Park, Dae-Hee (School of Electrical, Electronic and Information Engineering, Wonkwang University)
  • 발행 : 2003.10.01
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초록

We have demonstrated a fluidic technique for self-assembly of microfabricated parts onto substrate using patterned shapes of magnetic force self-assembled monolayers (SAMs). The metal particles and the array were fabricated using the micromachining technique. The metal particles were in a multilayer structure (Au, Ti, and Ni). Sidewalls of patterned Ni dots on the array were covered by thick negative photoresist (SU-8), and the array was magnetized. The array and the particles were mixed in buffer solution, and were arranged by magnetic force interaction. Binding direction of the metal particle onto Ni dots was controlled by multilayer structure and direction of magnetization. A quarter of total Ni dots were covered by the particles. The binding direction of the particles was controllable, and condition of particles was almost even with the Au surface on top. The particles were successfully arranged on the array.

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참고문헌

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