Abstract
A study has been made of surface modification of various organic materials by ion implantation to increase the surface electrical properties. The substrate used were PP(polypropylene), PET(polyethylene teraphthalate), ECOP(ethylene copolyester), PS(polystyrene). N$_2$, Ar ion implantation was performed at energies of 40 and 50keV with fluences from 5${\times}$ 10$\^$15/ to 7${\times}$10$\^$16/ ions/$\textrm{cm}^2$ with and without H$_2$O gas environment. Surface resistance decrease of implanted polymers was affected by ion implantation energy, ion species, atmosphere of chamber and kind of polymer. In result, surface conductivity of polymers irradiated with atmosphere gas H$_2$O was 10 times more higher than normal vacuum atmosphere, but after 90 hours, surface conductivity returned to the without H$_2$O gas atmosphere condition caused by aging effect. After vacuum forming, surface resistance value was changed to over 10$\^$16/$\Omega$/$\square$, because creation of surface cracks.
