Journal of the Optical Society of Korea

  • 제7권3호
  • /
  • Pages.166-173
  • /
  • 2003
  • /
  • 1226-4776(pISSN)
  • /
  • 2093-6885(eISSN)
한국광학회 (Optical Society of Korea)
권호 표지
DOI QR코드

DOI QR Code

Application of Micromachining in the PLC Optical Splitter Packaging

  • 투고 : 2003.06.27
  • 발행 : 2003.09.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

This paper presents micromachining results on planar-lightwave-circuit (PLC) chips with Si substrate and the quartz substrate by using Ti:Sapphire femtosecond-pulsed laser. The ablation process with femtosecond laser pulses generates nothing of contamination, molten zone, microcracks, shock wave, delamination and recast layer. We also showed that the micromachine for PLC using femtosecond pulsed lasers is superior to that using nanosecond pulsed lasers. The insertion loss and the optical return loss of the 1 ${\times}$ 8 optical power splitters packaged with micromachined input- and output-port U-grooves were less than 11.0 ㏈ and more than 55 ㏈, respectively. The wavelength dependent loss (WDL) was distributed within $\pm$0.6 ㏈ and the polarization dependent loss (PDL) was less than 0.2 ㏈.

키워드

참고문헌

  1. F. N. Goodall, R. A. Moody, and W. T. Welford, “Reduction photolithography by ablation at wavelength 193nm,” Optical communications, vol. 57, pp. 227-229, 1986. https://doi.org/10.1007/s003390051419
  2. R. Srinivasan, “Ablation of polymers and biological tissue by ultraviolet lasers, Science,” Science, vol. 234, pp. 559-565, 1986. https://doi.org/10.1126/science.3764428
  3. V. Oliveira, O. Conde, and R. Vilar, “UV Laser Micromachining of Ceramic Materials: Formation of Columnar Topographies,” Advanced engineering materials, Vol. 3, No.1/2, pp.75-81, 2001. https://doi.org/10.1002/1527-2648(200101)3:1/2<75::AID-ADEM75>3.0.CO;2-Z
  4. B. N. Chichkov, C. Momma, S. Nolte, F. v. Alvensleben, and A. Tunnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Applied Physics A, vol. 63, pp. 109-115. 1996. https://doi.org/10.1007/BF01567637
  5. C. Momma, B. N. Chichkov, S. Nolte, F. v. Alvensleben, A. Tunnermann, H. Welling, and B. Wellegehausen, “Short-pulse laser ablation of solid targets,” Optics communications, vol. 129, pp. 134-142, 1996. https://doi.org/10.1016/0030-4018(96)00250-7
  6. C. Momma, S. Nolte, B. N. Chichkov, F. V. Alvenseben, and A. Tunnermann, “Precise laser ablation with ultrashort pulses,” Applied surface science, vol. 109/110, pp. 15-19, 1997. https://doi.org/10.1016/S0169-4332(96)00613-7
  7. F. Korte, S. Nolte, B. N. Chichkov, T. Bauer, G. Kamlage, T. Wagner, C. Fallnich, and H. Welling, “Far-field and near-field material processing with femtoseond laser pulses,” Applied physics A Materials science & processing, Vol. 69, No. 7, pp. S7-S11, 1999. https://doi.org/10.1007/s003390051346
  8. H. Varel, D. Ashkenasi, A. Rosenfeld, and M. Wahmer, “Micromachining of quartz with ultrashort laser pulses,” Applied physics A, vol. 65, pp. 367-373, 1997. https://doi.org/10.1007/s003390050593
  9. J. Kr¨uger, W. Kautek, M. Lenzner, S. Sartania, C. Spielmann, and F. Krausz, “Laser micromachining of barium aluminium borosilicate glass with pulse durations between 20 fs and 3 ps,” Applied surface science, vol. 127-129, pp. 892-898, 1998. https://doi.org/10.1016/S0169-4332(97)00763-0
  10. S. Preuss, A. Demchuk, and M. Stuke, “Subpicosecond UV laser ablation of metals,” Applied physics, vol. 61, pp 33-37, 1995. https://doi.org/10.1007/BF01538207
  11. Ameer-Beg, W. Perrie, S. Rathbone, J. Wright, and W. Weaver, “Femtosecond laser microstructuring of materials,” Applied surface science, vol. 127-129, pp. 875-880, 1998. https://doi.org/10.1016/S0169-4332(97)00760-5
  12. M. Kawachi, “Recent progress in silica-based planar lightwave circuits on silicon,” IEE Proc.- Optoelectron., vol. 143, pp. 257-262, 1996. https://doi.org/10.1049/ip-opt:19960493
  13. S. I. Anisimov, M. I. Tribel'skii, and Ya,G. Epel'baum, Sov. Phys., JETP 51, pp. 802-807, 1980.
  14. Y. Hibino, F. Hanawa, H. Nakagome, M. Ishi, and N. Takato, “High reliability optical splitters composed of silica-based planar lightwave circuits,” Journal of lightwave technology, vol. 13, pp. 1728-1735, 1995. https://doi.org/10.1109/50.405317
  15. A. Sugita, K. Onose, Y. Ohmori, and M. Yasu, “Optical fiber coupling to single-mode silica-based planar lightwaveguide circuits with fiber-guiding grooves,” Fiber and integrated optics, vol. 12, pp. 347-354, 1993. https://doi.org/10.1080/01468039308204235
  16. C. Buerhop, B. Blumenthal, R. Weissmann, N. Lutz, and S. Biermann, “Glass surface treatment with excimer and $CO_2$ lasers,” Applied surface science, vol. 46, pp. 430-434, 1990. https://doi.org/10.1016/0169-4332(90)90184-2
  17. B. C. Choi, J. H. Choi, H. I. Lee, C. S. Park, and M. S. Lee, “The development of packaging technique in 1 × 8 optical splitter using the passive alignment method,” in Proceedings of photonics conference '02, pp. 703, 2002.
  18. B. C. Choi, J. H. Choi, H. I. Lee, C. S. Park, and M. S. Lee, “The Passive alignment technique of fiber-towaveguide,” in ICEP, '03, pp. 122-126, 2003.