참고문헌
- P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, “Machining of sub-micron holes using a femtosecond Laser at 800 nm,” Optics Comm., vol. 114, pp. 106-110, 1995. https://doi.org/10.1016/0030-4018(94)00585-I
- T. Juhasz, R. Kurtz, C .Horvath, C. Suarez, F. Raks, and G. Spooner, “Photonic device fabrication with femtosecond laser oscillators,” Optics & Photonics News, vol. 24, pp. 55-49, 2002.
- K. Minoshima, A.M. Kowalwviz, I. Hartl, E.P. Ippen, and J.G. Fujimoto, “Photonic device fabrication with femtosecond laser oscillators,” Optics & Photonics News, vol. 14, pp. 44-49, 2003. https://doi.org/10.1364/OPN.14.5.000044
- F. Korte, J. Serbin, J. Kochi, A. Egbert, C. Fallnich, A. Ostendorf, and B.N. Chichkov, “Towards nanostructuring with femtosecond laser pulses,” Appl. Phys. A, vol.77, pp. 229-235, 2003. https://doi.org/10.1007/s00339-003-2110-z
- R. Haight, D. Hayden, P. Longo, T. Neary, and A. Wagner, “Implementation and performance of a femtosecond laser mask repair system in manufacturing,” Pro. SPIE, issue. 3546, pp. 477-484, 1998. https://doi.org/10.1117/12.332872
- Y. Shani, I. Melnick, S. Yoffe, Y. Sharon, K. Liebermann, and H. Terkel, “High-resolution near-field mask repair with femtosecond laser,” Pro. SPIE, issue. 3546, pp. 112-120, 1998. https://doi.org/10.1117/12.332815
- J. Serbin, T. Bauer, C. Fallnich, A. Kasenbacher, and W. H. Arnold, “Femtosecond laser as novel tool in dental surgery,” Appl. Surf. Sci., vol. 197-198, pp. 737-740, 2002. https://doi.org/10.1016/S0169-4332(02)00402-6
- B. N. Chickkov, C. Momman, S. Nolte, F. Von Alvenslebe, and A. Tunnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Appl. Phys. A, vol. 63, pp. 109-115, 1996. https://doi.org/10.1007/BF01567637
- D. Ashkenasi, G. Muller, A. Rosenfeld, R. Stoian, I. V. Hertel, N. M. Bugakova, and E. E. B. Campbell, “Fundamentals and advantages of ultrafast microstructuring of transparent materials,” Appl. Phys. A, vol. 77, pp. 223-228, 2003 https://doi.org/10.1007/s00339-003-2143-3
- K. Venkatakrishinan, B. Tan, and N. R. Sivakumar, “Sub-micron ablation of metalic thin film by femtosecond pulse laser, ” Optics & Laser Technol., vol. 34, pp. 575-578, 2002. https://doi.org/10.1016/S0030-3992(02)00074-9
- X. Liu, D. Du, and G. Mourou, “Laser ablation and micromachining with ultrashort laser pulses,” IEEE J. Quantum Electron, vol. 33, pp. 1706-1716, 1997. https://doi.org/10.1109/3.631270
- Y. Hirayama and M. Obara, “Heat effects of metals ablated with femtosecond laser pulses,” Appl. Surf. Sci., vol. 197-198, pp. 741-745, 2002. https://doi.org/10.1016/S0169-4332(02)00403-8
- D. Y. Tzou, J. K. Chen, and J. E. Beraun, “Hotelectron blast induced by ultrashort-pulsed lasers in layered media,” Int. J. Heat and Mass Trans., vol. 45, pp. 3369-3382, 2002. https://doi.org/10.1016/S0017-9310(02)00053-4
- A. Chimmalgi, T. Y. Choi, C. P. Grigoropoulos, and K. Komvopoulos, “Femtosecond laser apertureless near-field nanomachining of metals assisted by scanning probe microscopy,” Appl. Phys. Lett., vol. 82, pp. 1146-1148, 2003. https://doi.org/10.1063/1.1555693
- R. A. House II and A. H. Guenther, Laser Induced Damage in Optical Materials (NBS Spec. Pub., 1976), pp. 338-340.
- M. Li, M. Ishizuka, X. Liu, Y. Sugimoto, N. Ikeda, and K. Asakawa, “Nanostructuring in submicronlevel waveguides with femtosecond laser pulses,” Opt. Comm., vol. 212, pp. 159-163, 2002. https://doi.org/10.1016/S0030-4018(02)01956-9
- W. Koshinski, A. Schirmacher, and E. Sutter, “Induced transmittance of eye-protective laser filters,” J. Laser Appl., vol. 10, pp. 126-130, 1998. https://doi.org/10.2351/1.521838
- J. Kruger, M. Lenzner, S.Martin, M. Lenner, C. Spielmann, A. Fiedler, and W. Kautek, “Single-and multipulse femtosecond laser ablation of optical filter materials,” Appl. Surf. Sci., vol. 208-209, pp. 233-237, 2003. https://doi.org/10.1016/S0169-4332(02)01389-2
- S. Nolte, C. Momma, H. Jacobs, A. Tunnermann, B. N. Chichkov, B. Wellegehausen, and H. Welling, “Ablation of metals by ultrashort laser pulses,” J. Opt. Soc. Am. B, vol. 14, pp. 2716-2722, 1997. https://doi.org/10.1364/JOSAB.14.002716
- S. S. Wellershoff, J. Hohlfeld, J. Gudde, and E. Matthias, “The role of electron-phonon coupling in femtosecond laser damage of metals,” Appl. Phys. A, vol. 69, pp. S99-S107, 1999. https://doi.org/10.1007/s003390051362
- R. Stoian, M. Boyle, A. Thoss, A. Rosenfeld, G. Korn, I. V. Hertel, and E. E. B. Campbell, “Laser ablation of dielectrics with temporally shaped femtosecond pulses,” Appl. Phys. Lett., vol. 80, pp. 353-355, 2002. https://doi.org/10.1063/1.1432747
- E. G. Gamaly, A. V. Rode, and B. Luther-Davies, “Ablation of solids by femtosecond laser: ablation mechanism and ablation thresholds for metals and dielectrics,” Phys. Plasmas, vol. 9, pp. 949-957, 2002. https://doi.org/10.1063/1.1447555
-
R. Stoian, D. Ashkenasi, A. Rosenfeld, and E. E. B. Campbell, “Coulomb explosion in ultrashort pulsed laser ablation of
$Al_2O_3$ https://doi.org/10.1103/PhysRevB.62.13167,” Phys. Rev. B, vol. 62, pp. 13167-13173, 2001. - S. Preuss, A. Demchuk, and M. Stuke, “Subpicosecond UV laser ablation of metals,” Appl. Phys. A, vol. 61, pp. 33-37, 1995. https://doi.org/10.1007/BF01538207
- J. Kruger and W. Kautek, “In Laser-Induced Thin Film Processing,” J. J. Dubowski, Ed. Proc. SPIE, vol. 2403, pp. 436-439, 1995. https://doi.org/10.1117/12.206276
- S. Kim, D. W. Chang, S. Y. Park, S. C. Jeoung, and D. Kim, “Excited-state intramolecular proton transfer and stimulated emission from phototautomerizable polyquinoline film,” Macromolecules, vol. 35 pp. 6064-6066, 2002. https://doi.org/10.1021/ma020319z
- M. Lenzner, J. Kruger, S. Sartania, Z. Cheng, C. Spielmann, G. Mourou, W. Kautek, and F. Krausz, “Femtosecond optical breakdown in dielectrics,” Phys. Rev. Lett., vol. 80, pp. 4076-4079, 1998. https://doi.org/10.1103/PhysRevLett.80.4076
- W. Kautek and J. Kruger, “Laser ablation of dielectrics with pulse durations between 20 fs and 3 ps,” Appl. Phys. Lett., vol. 69, pp. 3146-3148, 1996. https://doi.org/10.1063/1.116810
- P. Rudolph, J. Bonse, J. Kruger, and W. Kautek, “Femtosecond- and nanosecond-pulse laser ablation of bariumalumoborosilicate glass,” Appl. Phys. A, vol. 69, pp. S763-S766, 1999. https://doi.org/10.1007/s003390051524
피인용 문헌
- XRD studies on the femtosecond laser ablated single-crystal germanium in air vol.43, pp.12, 2005, https://doi.org/10.1016/j.optlaseng.2004.12.010
- Formation of Tm2+ ions in germanosilicate glass optical fibers vol.351, pp.27-29, 2005, https://doi.org/10.1016/j.jnoncrysol.2005.05.021
- Ultrafast laser ablation of indium tin oxide thin films for organic light-emitting diode application vol.44, pp.2, 2006, https://doi.org/10.1016/j.optlaseng.2005.03.009
- Effect of two-photon spatial bunching on single photon detection rates vol.14, pp.6, 2003, https://doi.org/10.3807/KJOP.2003.14.6.573
- Formation mechanism of nanostructures in soda–lime glass using femtosecond laser vol.357, pp.3, 2011, https://doi.org/10.1016/j.jnoncrysol.2010.11.006