Journal of Mechanical Science and Technology

The Korean Society of Mechanical Engineers (대한기계학회)
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Design and Performance Evaluation of a 3-DOF Mobile Microrobot for Micromanipulation

  • Park, Jungyul (Microsystem Research Center, Korea Institute of Science and Technology) ;
  • Kim, Deok-Ho (Microsystem Research Center, Korea Institute of Science and Technology) ;
  • Kim, Byungkyu (Microsystem Research Center, Korea Institute of Science and Technology) ;
  • Kim, Taesung (Department of Mechanical Engineering, University of Michigan G. G. Brown) ;
  • Lee, Kyo-Il (School of Mechanical and Aerospace Engineering, Seoul National University)
  • Published : 2003.09.01
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Abstract

In this paper, a compact 3-DOF mobile microrobot with sub-micron resolution is presented. It has many outstanding features : it is as small as a coin ; its precision is of sub-micrometer resolution on the plane ; it has an unlimited travel range ; and it has simple and compact mechanisms and structures which can be realized at low cost. With the impact actuating mechanism, this system enable both fast coarse motion and highly precise fine motion with a pulse wave input voltage controlled. The 1 -DOF impact actuating mechanism is modeled by taking into consideration the friction between the piezoelectric actuator and base. This modeling technique is extended to simulate the motion of the 3-DOF mobile robot. In addition, experiments are conducted to verify that the simulations accurately represent the real system. The modeling and simulation results will be used to design the model-based controller for the target system. The developed system can be used as a robotic positioning device in the micromanipulation system that determines the position of micro-sized components or particles in a small space, or assemble them in the meso-scale structure.

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References

  1. Adriaens, H., et al., 2000, 'Modeling Piezoelectric Actuators,' IEEE/ASME Transactions on Mechatronics, Vol. 5, No.4, pp. 331-341 https://doi.org/10.1109/3516.891044
  2. Fahlbusch, S. and Fatikow, S., 2001, 'Implementaton of Self-Sensing SPM Cantilevers for Nano-Force Measurement in Microrobotics,' Ultramicroscopy, Vol. 86, pp. 181-190 https://doi.org/10.1016/S0304-3991(00)00085-1
  3. Higuchi, T., et al., 1990, 'Precise Positioning Mechanism Utilizing rapid Deformations of Piezoelectric Elements,' Micro Electro Mechanical Systems, Proceedings, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots. IEEE, pp.222-226 https://doi.org/10.1109/MEMSYS.1990.110280
  4. Juhas, L., et al., 2000, 'Development of Platform for Micro-Positioning Actuated by Piezo-Legs,' Proceedings of the 2000 IEEE International Conference on Robotics & Automation, San Francisco, CA, pp. 3647-3653 https://doi.org/10.1109/ROBOT.2000.845300
  5. Kim, D. H., et al., 2002, 'Implementation of Self-Sensing MEMS Cantilevers for Nanomanipulation,' Proc. the 4th Korean MEMS conference, pp. 120-125
  6. Lee, J. K., et al., 1999, 'Piezoelectric Smart Structures for Noise Reduction in a Cabin,' KSME International Journal, Vol. 13, No.6, pp.451-458
  7. Martel, S., et al., 1999, 'NanoWalker : A Fully Autonomous Highly Integrated Miniature Robot for Nano-Scale Measuremtents,' Proceedings of the European Optical Society (EOS) and SPIE International Symposium on Enviosense, Microsystems Metrology and Inspection, Vol. 3825, Munich, Germany 12 pages
  8. Mendes, J., et al., 1996, 'Printed Board Positioning System Using Impact Drive Mechanism,' SICE, Tottori, pp 1123-1128
  9. Michael, G. and Nikola, C., 1997, 'Modeling Piezoelectric Stack Actuators for Control of Micromanipulation,' IEEE Control Systems Magazine, Vol. 17, No.3. pp.69-79 https://doi.org/10.1109/37.588158
  10. Nam, Y. S. and Sasaki, M., 2002, 'Strain Rate Self-Sensing for a Cantilevered Piezoelectric Beam,' KSME International Journal, Vol. 16, No.3, pp. 310-319
  11. Oh, J. E., et al., 2000, 'Active Vibration Control of Flexible Cantilever Beam Using Piezo Actuator and Filtered-X LMS Algorithm,' KSME International Journal, Vol. 12, No. 4, pp. 665-671
  12. Sheppard, C. J. R., 1997, Confocal Laser Scanning Microscopy, Springer
  13. Shim, J. Y. and Gweon, D. G., 2001, 'Piezo-Driven Metrological Multiaxis Nanopositoner,' Review of Science Instruments, Vol. 72, No. 11, pp. 4183-4187 https://doi.org/10.1063/1.1408932
  14. Yamagata, Y. and Higuchi, T., 1995, ' A Micropositioning Device for Precision Automatic Assembly Using Impact Force of Piezoelectric Elements,' IEEE International Conference on Robotics and Automation, Nagoya, Aichi, Japan, pp. 666-671 https://doi.org/10.1109/ROBOT.1995.525360
  15. Review of Science Instruments v.72 no.11 Piezo-Driven Metrological Multiaxis Nanopositoner Shim,J.Y.;Gweon,D.G. https://doi.org/10.1063/1.1408932
  16. IEEE International Conference on Robotics and Automation A Micropositioning Device for Precision Automatic Assembly Using Impact Force of Piezoelectric Elements Yamagata,Y.;Higuchi,T.