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전기전자재료학회논문지
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1999 Electronic Components and Technology Conference. IEEE
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$Ta_2O_5$ thin films deposited on Ta S.Ezhilvalavan;Tseung Yuen Tseng - 전기전자재료학회논문지 v.14 no.12 Au/Ta2O5/Pt MIM capacitor의 annealing 유전특성 김인성;정순종;송재성;윤문수;박정후
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Sol-Gel 법에 의한
$Ta_2O_5$ 박막의 전기전도와 광학적 특성 유영각