Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지
DOI QR코드

DOI QR Code

Dielectric and Piezoelectric Properties of xPb(Al0.5Nb0.5)O3-(1-x)Pb(Zr0.52Ti0.48)O3 Thin films Prepared by PLD

PLD법으로 제작된 xPb(Al0.5Nb0.5)O3-(1-x)Pb(Zr0.52Ti0.48)O3박막의 유전 및 압전 특성

  • 김민철 (한국 과학 기술 연구원 박막 재료 연구센터) ;
  • 박용욱 (남서울대학교 전자정보통신공학부) ;
  • 최지원 (한국 과학 기술 연구원 박막 재료 연구센터) ;
  • 강종윤 (한국 과학 기술 연구원 박막 재료 연구센터) ;
  • 안병국 (전북대학교 신소재공학부) ;
  • 김현재 (한국 과학 기술 연구원 박막 재료 연구센터) ;
  • 윤석진 (한국 과학 기술 연구원 박막 재료 연구센터)
  • Published : 2003.09.01
Download PDF
⟨ Previous Next ⟩

Abstract

The dielectric and piezoelectric properties of the xPb(A $l_{0.5}$N $b_{0.5}$) $O_3$-(1-x)Pb(Z $r_{0.52}$ $Ti_{0.48}$) $O_3$ [xPAN-(1-x)PZT] thin films by pulsed laser deposition (PLD) were investigated as a function of PAN contents. The effect of texture on dielectric and piezoelectric properties of the 0.05PAN-0.95PZT thin films having the highest piezoelectric constant( $d_{33}$) was studied more precisely. For 0$\leq$x$\leq$0.15 compositions in xPAN-(1-x)PZT thin films, the well-developed perovskite phase with (111) preferred orientation was obtained at the deposition temperature of 50$0^{\circ}C$. With increasing PAN content, remanent polarization and coercive field decreased. The dielectric constant increased with an increase of PAN content until it reached 1450 at $\chi$= 0.05, and then decreased for higher PAN content. The maximum points of dielectric constant coincides with the maximum points of the piezoelectric constant $d_{33}$.33/.33/././.

Keywords

References

  1. Sensors and Actuators v.83 A cylindrical shaped micro ultrasonic motor utilizing PZT thin film (1.4 mm in diameter and 5.0 mm long stator transducer) T.Morita;M.K.Kurosawa;T.Higuchi https://doi.org/10.1016/S0924-4247(99)00388-X
  2. Microelectronics Journal v.29 Microactuators and their applications H.Fujita;H.Toshiyoshi https://doi.org/10.1016/S0026-2692(98)00027-5
  3. Sensors and Actuators v.A89 PZT actuated micromirror for finetracking mechanism of high-density optical data storage Y.Yee;H.Nam;S.Lee;J.U.Bu;J.Lee
  4. J. Am. Ceram. Soc. v.48 Piezoelectric properties of Pb($Mg_{⅓}Nb_{⅔}$) O₃-PbTiO₃-PbZrO₃solid slution ceramic H.Ouchi;K.Nagano;S.Hayakawa https://doi.org/10.1111/j.1151-2916.1965.tb14694.x
  5. J. Materials Science v.26 Piezoelectric properties of (Pb, Sr)(Zr, Ti, Mn, Zn, Nb)O₃ piezoelectric ceramic L.Wu;C.K.Liang;C.F.Shineu https://doi.org/10.1007/BF00543665
  6. J. Am. Ceram. Soc. v.81 Piezoelectric properties of Pb[Zr0.45Ti0.5-xLu-$x($Mn_{⅓}Sb_{⅔}$)_{0.05}$]O₃ ceramics S.J.Yoon;H.W.Kang;S.I.Kucheiko;H.J.Kim;H.J.Jung https://doi.org/10.1111/j.1151-2916.1998.tb02646.x
  7. J. Am. Ceram. Soc. v.81 Structure of duplex multilayer Pb($Zr_{0.53}Ti_{0.47}$)O₃ films prepared by sol-gel processing K.Miyazawa;K.Ito https://doi.org/10.1111/j.1151-2916.1998.tb02296.x
  8. Thin Solid Films v.377 Ferroelectric and antiferroelectric films for microelectromechanical systems application B.Xu;L.E.Cross;J.J.Bernstein https://doi.org/10.1016/S0040-6090(00)01322-5
  9. Thin Solid Films v.385 Thickness-dependant microstructures and electrical properties of PZT films derived from sol-gel process J.Cheng;Z.Meng https://doi.org/10.1016/S0040-6090(00)01915-5
  10. 전기전자재료학회논문지 v.5 no.2 Dielectric and piezoelectric properties of the xPb($Al_{0.5}Nb_{0.5}$)O₃-(1-x)Pb($Zr_{0.5}2Ti_{0.48}$)O₃system(1) 이홍렬;윤석진;김현재;정현진
  11. 전기전자재료학회논문지 v.7 no.5 Fabrication and characteristics of PZT ferroelectric thin films by sol-gel processing and rapid thermal annealing 백동수;최형욱;김준한;신현용;김규수;박창엽
  12. 전기전자재료학회논문지 v.11 no.7 Electrical properties and fabrication of ferroelectric(PZT, PST, PTO)/YBCO structures by pulsed laser deposition 김정환;이재형;문병무