Electrical & Electronic Materials (E2M - 전기 전자와 첨단 소재)
- Volume 16 Issue 9
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- Pages.62.2-62
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- 2003
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- 2982-6268(pISSN)
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- 2982-6306(eISSN)
Material characteristics of electrically tunable zirconium oxide thin films
- Cho, Byeong-Ok (Dept. of Chemical Engineering, University of California) ;
- Jane P. Chang (Dept. of Chemical Engineering, University of California)
- Published : 2003.09.01
Abstract
Material Characteristics of zirconium oxide thin films obtained by plasma enhanced chemical vapor deposition on p-type Si(100) substrates were investigated to explain their unable electrical properties. The films obtained without heating had polycrystalline nanograins that are mostly of a tetragonal phase under oxygen-deficient plasma conditions but transformed into a monoclinic phase with increasing
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