Electrical & Electronic Materials (E2M - 전기 전자와 첨단 소재)
- Volume 16 Issue 9
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- Pages.61.3-62
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- 2003
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- 2982-6268(pISSN)
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- 2982-6306(eISSN)
High-k dielectrics by UV photo-assisted chemical vapour deposition
- Fang, Q. (Dept. Electronic & Electrical Engineering, University College London) ;
- Zhang, J.Y. (Dept. Electronic & Electrical Engineering, University College London) ;
- Wang, Z.M. (Dept. Electronic & Electrical Engineering, University College London) ;
- He, G. (Dept. Electronic & Electrical Engineering, University College London) ;
- Yu, J. (Dept. Electronic & Electrical Engineering, University College London) ;
- Boyd, Ian W. (Dept. Electronic & Electrical Engineering, University College London)
- Published : 2003.09.01
Abstract
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