한국레이저가공학회지 (Laser Solutions)
- 제6권2호
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- Pages.35-41
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- 2003
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- 1229-0963(pISSN)
니켈 전주도금을 위한 PET의 엑시머 레이저 어블레이션
The excimer laser ablation of PET for nickel electroforming
- Shin, Dong-Sik (Laser Application group, Korea Institute of Machinery & Materials) ;
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Lee, Je-Hoon
(Laser Application group, Korea Institute of Machinery & Materials) ;
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Seo, Jung
(Laser Application group, Korea Institute of Machinery & Materials) ;
- Kim, Do-Hoon (Dept. of Metallugical System Engineering, Yonsei University)
- 발행 : 2003.08.01
초록
In this study, manufacturing of polymer master and mold insert for micro injection molding was investigated. Ablation by excimer laser radiation could be used successfully to make 3-D microstructure of PET. The mechanism for ablative decomposition of PET with KrF excimer laser(λ: 248nm, pulse duration: 5ns) was explained by photochemical process. And this process showed PET to be adopted in polymer master for nickel mold insert. Nickel electroforming by using laser ablated PET master was preferable for replication method. Finally, it was shown that excimer laser ablation can substitute for X-ray lithography of LIGA process in microstructuring.
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