Transactions of Materials Processing (소성∙가공)

The Korean Society for Technology of Plasticity and materials processing (한국소성∙가공학회)
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Study on the Frictional Behavior, Wear and Corrosion Resistance of Textured TiN Coated Layers

집합조직이 존재하는 TiN 코팅 층의 마찰, 마멸, 내부식 특성에 관한 연구

  • 김희동 (금오공과대학교 신소재시스템공학부) ;
  • 김인수 (금오공과대학교 신소재시스템공학부) ;
  • 성동영 (금오공과대학교 신소재시스템공학부) ;
  • 이민구 (금오공과대학교 신소재시스템공학부)
  • Published : 2003.07.01
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Abstract

TiN coated films exhibit excellent mechanical properties such as high wear, erosion and corrosion resistances and a high thermal stability. Therefore, they are widely applied to a coating material in tools, ornaments, parts and semiconductors. However, the fracture of TiN coated films frequently occurs. The distribution of preferred orientations, i.e., texture, of TiN coated films strongly influences the fracture behavior of these films. In the present study. various TiN coating layers having different textures were prepared by the reactive ion physical vapor deposition and the texture dependence of friction coefficient, erosion and corrosion in these coating layers was investigated. The sample depicting the (115) texture parallel to the coating layer normal displayed a flatter surface than that observed from the sample having the (111) texture. The friction coefficient of TiN thin films was hardly dependent on the texture of coated samples. The samples having (115) texture displayed higher wear, erosion and corrosion resistances than the samples having (111) texture.

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References

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