Laser Solutions (한국레이저가공학회지)
- Volume 6 Issue 1
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- Pages.33-40
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- 2003
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- 1229-0963(pISSN)
Excimer laser induced ablation of PMMA and PET
엑시머 레이저를 이용한 PMMA와 PET의 가공
- Shin, Dong-Sik (Laser Application group, Korea Institute of Machinery & Materials) ;
- Lee, Je-Hoon (Laser Application group, Korea Institute of Machinery & Materials) ;
- Seo, Jung (Laser Application group, Korea Institute of Machinery & Materials) ;
- Kim, Do-Hoon (Dept. of Metallugical System Engineering, Yonsei University)
- Published : 2003.04.01
Abstract
The ablative decomposition mechanism of PMMA(polymethyl methacrylate) and PET(polyethylene terephthalate) with KrF excimer laser(λ : 248nm, pulse duration: 5㎱) is investigated. The UV/Vis spectrometer analysis showed that PMMA is a weak absorber and PET is a strong absorber at the wavelength of 248nm. The results(surface debris, melt, etch depth, etching shape) from drilling and direct writing experiments imply that ablation mechanism of PMMA is dominated by photothermal process, while that of PET is dominated by photochemical process.
Keywords