한국전자파학회지:전자파기술 (The Proceeding of the Korean Institute of Electromagnetic Engineering and Science)

한국전자파학회 (The Korean Institute of Electromagnetic Engineering and Science)
권호 표지

RF MEMS 필터 기술 동향

  • 육종관 (연세대학교 기계전자공학부) ;
  • 이상노 (연세대학교 기계전자공학부)
  • 발행 : 2003.07.01
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초록

키워드

참고문헌

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  4. Liwei Lin, Roger T. Howe and Albert P. Pisano, 'Microelectromechanical Filters for Signal Processing', IEEE J Microelectromech. Syst., vol. 7, pp. 286-294, Sep. 1998 https://doi.org/10.1109/84.709645
  5. G. E. Ponchak, A. N. Downey, 'Characterization of Thin Film Microstrip Lines on Polyimide,' IEEE Trans. on Components, Hybrids, and Manufacturing Tech., vol. 21, pp. 171-176, May 1998
  6. S. N. Lee, O. K. Lim, J. G. Yook and Y. J. Kim, 'High Performance Elevated Thin Film Microstrip on Polyimide-Ioaded Silicon', accepted in EuMC 2003, Munich Germany, Oct. 2003
  7. H. J. D. L. Santos, Introduction to Microelectromechanical (MEM) Microwave Systems, Boston, Artech House, 1999
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  10. T. M. Weller, Linda. P. B. Katehi and G. M. Rebeiz, 'A 250-GHz Microshield Bandpass Filter', IEEE Microwave and Guided Wave Lett., vol. 5, no. 5, pp. 153-155, May 1995 https://doi.org/10.1109/75.374082
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  12. T. M. Weller, K. J. Herrick and Linda. P. B. Katehi, 'Quasi-Static Design Technique for mm-Wave Micromanchined Filters with Lumped Elements and Series Stubs', IEEE Trans. on MIT, vol. 45, no. 6, pp. 931-938. June 1997 https://doi.org/10.1109/22.588605
  13. T. L. Willke, S. S. Gearhart, 'LIGA micromachined planar transmission lines and filters', IEEE Trans. on MIT, vol. 45, no. 10, pp. 1681-1688. Oct. 1997 https://doi.org/10.1109/22.641711
  14. K.-Y. Park, et aI., 'A New Three-Dimensional 30 GHz Bandpass Filter Using The LIGA Micromachined Process', Microwave and Optical Tech. Lett., vol. 30, no. 3, pp. 199-201, Aug. 2001 https://doi.org/10.1002/mop.1264
  15. H. J. D. L. Santos, RF MEMS Circuit Design for Wireless Communciations, Boston, Artech House, 2002
  16. M. Ylilammi, J. Ella, M. Partanen, and J. Kaitila, 'Thin Film Bulk Acoustic Wave Filter', IEEE Trans. on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 49, no. 4, pp. 535-539, April 2002 https://doi.org/10.1109/58.996574
  17. R. Aigner, 'RF-MEMS Filters Manufactured on Silcon: Key Facts about Bulk-Acoustic-Wave Technology', IEEE Digest for Silicon Monolithic Integrated Circuits in RF Systems, pp. 157-161, 2003
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  19. K. W. Kim, G. Y. Kim, J. G. Yook and H. K Park, 'Air-gap Type TFBAR-based Filter Topologies', Microwave and Optical Tech. Lett., vol. 34, no. 5, pp. 386-387, Sep. 2002 https://doi.org/10.1002/mop.10470