대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

PLD를 이용한 ZnO 박막의 구조적 특성과 표면의 형태에 관한 연구

The Structural Characteristic and Surface Morphology of ZnO Thin Films by Pulsed Laser Deposition

  • 김재홍 (인하대학교 전기공학과) ;
  • 이경철 (인하대학교 전기공학과) ;
  • 이천 (인하대학교 전기공학과)
  • 발행 : 2003.06.01
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초록

ZnO thin films on (100) p-type silicon substrates have been deposited by pulsed laser deposition(PLD) technique using an Nd:YAG laser with a wavelength of 266nm. The influence of the deposition parameters, such as oxygen pressure, substrate temperature and laser energy density variation on the properties of the grown film, was studied. The experiments were performed for oxygen gas flow rate of 100~700 sccm and substrate temperatures in the range of 200~$500^{\circ}C$. We investigated the structural and morphological properties of ZnO thin films using X-ray diffraction(XRD), scanning electron microscopy(SEM) and atomic force microscopy(AFM).

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