Abstract
With the development of micro -technology, the demand for micro actual ing device is increasing. But, it is difficult to achieve high resolution and wide bandwidth with the conventional contact systems. So, the contact-free systems which are suspended or levitated by magnetic force or air bearing were proposed. These systems can be applied to high precision stages and alignment apparatuses. This paper describes a magnetically suspended system with four degrees of freedom which are composed of three rotations (roll, pitch, yaw), and one translation ( z). The operating principle and the structure of the system are similar to variable reluctance type electric machines. In this study, the force analysis is executed using magnetic circuit and virtual work principle, and the equations that describe the dynamics of the system are presented. The multivariable PID controller is adapted to the system and the experiment is executed.
