Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지
DOI QR코드

DOI QR Code

Electrical Characteristics of Bi3.25Nd0.75Ti3O12 Ferroelectric Thin Films Prepared by MOD Process Depending on Annealing Temperatures

MOD법을 이용 제조한 Bi3.25Nd0.75Ti3O12 강유전 박막의 열처리 온도에 따른 전기적 특성

  • Published : 2003.07.01
Download PDF
⟨ Previous Next ⟩

Abstract

Ferroelectric B $i_4$$_{-x}$N $d_{x}$ $Ti_3$ $O_{12}$ (BNdT) thin films with the composition(x=0.75) were prepared on Pt/Ti/ $SiO_2$(100) substrate by metal-organic deposition. The films were annealed by various temperatures from 550 to $650^{\circ}C$ and then the electrical and structural characteristics of BNdT films were investigated for the application of FRAM. Electrical properties such as dielectric constant, 2Pr and capacitance were quite dependent on the thermal heat treatment. The measured 2Pr value on the BNdT capacitor annealed at $650^{\circ}C$ was 56$\mu$C/$\textrm{cm}^2$ at an applied voltage of 5V. In fatigue characteristics value remained constant up to 8$\times$10$^{10}$ read/write switching cycles at a frequency of 1Mhz regardless of annealing temperatures.

Keywords

References

  1. Journal of the Ceramic Society of Japan v.109 no.4 Preparation and ferroelectric properties of PZT thin films using a chemical solution deposition process Bo-Ping Zhang;Takashi ll Jima;Gand He;Norio Sanada https://doi.org/10.2109/jcersj.109.1268_299
  2. Appl. Phys. Lett. v.66 no.2 Influence of platinum interlayers on the electrical properties of RuO₂/PZT/RuO₂capacitor heterostructures H.N.Al-Shareef;K.R.Bellur;A.I.Kingon;O.Auciello https://doi.org/10.1063/1.113558
  3. 한국전기전자재료학회 v.14 no.4 Electrical properties of PZT thin films deposited on the Ru/RuO₂metal/oxide hybrid electrodes 송준태;정규원;박영
  4. Nature v.374 Fatigue-free ferroelectric capacitors with platinum electrodes C.A.Paz de Araujo;J.D.Cuchiaro;L.D.McMillan;M.C.Scott;J.F.Scott https://doi.org/10.1038/374627a0
  5. 전기전자재료학회논문지 v.13 no.2 기판조건에 따른 SBT 강유 전체 커패시터의 특성 박상준;장건익
  6. Nature v.401 Lanthanum-substitued bismuthtitanate for use in non-voltage memories B.H.Park;B.S.Kang;S.D.Bu;T.W.Noh https://doi.org/10.1038/44352
  7. 전기전자재료학회논문지 v.15 no.9 분위기 소결공정에 의한 $Bi_{3.75}La_{0.25}Ti_3O_{12}$ 세라믹의 강유전 특성 박춘배;송준태;김응권;박기엽 https://doi.org/10.4313/JKEM.2002.15.9.783
  8. Ferroelectrics v.271 Electrical properties of $Bi_{4-x}LaxTi_3O_{12}$ thin films J.H.Lee;K.B.Kim;G.E.Jang https://doi.org/10.1080/713716215