펨토초 레이저를 이용한 초정밀 가공의 원리 및 현상

  • 정성호 (광주과학기술원 기전공학과)
  • 발행 : 2003.04.01

초록

키워드

참고문헌

  1. Laser Processing and Chemistry D.Bauerle
  2. 대한전기학회지 v.50 no.5 레이저 가공의 원리 및 현상 정성호
  3. Nature v.412 no.16 Finer features for functional microdevices S. Kawata;H.B. Sun;T. Tanaka;K. Takada
  4. Appl. Phys. Lett. v.74 no.6 Three-dimensional photonic crystal structures achieved with two-photon-absorption photopolymerization of resin H.B. Sun;S. Matsuo;H. Misawa
  5. Nature v.398 Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication B.H. Cumpston;S.P. Ananthavel;S. Barlow;D.L. Dyer;J.E. Ehrlich;L.L. Erskine;A.A. Heikal;S.M. Kuebler;I.S. Lee;D.McCord Maughon;J. Qin;H. Rockel;M. Rumi;X. Wu;S.R. Marder;J.W. Perry
  6. The 14th IEEE international conference on MEMS Light-driven MEMS made by high-speed two-photon microstereolithography S. Maruo;K. Ikuta;K. Hayato
  7. Appl. Phys. Lett. v.71 no.23 Photowritten optical waveguides in various glasses with ultrashort pulse laser K. Miura;J. Qiu;H. Inouye;T. Mitsuyu;K. Hirao
  8. Appl. Phys. Lett. v.79 no.6 Femtosecond laser interference technique with diffractive bean spitter for fabrication of three-dimensional photonic crystals T. Kondo;S. Matsuo;S. Juodkazis;H. Misawa
  9. Opt. Lett v.21 no.24 Three-dimensional optical storage inside transparent materials E.N. Glezer;M. Milosavljevic;L. Huang;R.J. Finlay;T.H. Her;J.P. Callan;E. Mazur
  10. Opt. Lett. v.26 no.23 Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses K. Itoh;W. Watanabe;K. Yamada;D. Kuroda;J. Nishii;Y. Jiang
  11. Journal of Microscopy v.194 Near-field optical photomask repair with a femtosecond laser K. Lieberman;Y. Shani;I. Melnik;S. Yoffe;Y. Sharon