대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

추가된 수직전글을 구비한 저전압 구동의 광 스위칭용 정전구동 마이크로 액츄에이터

A Low Voltage Driven Electrostatic Micro Actuator with an Added Vertical Electrode for Optical Switching

  • 윤용섭 (삼성종합기술원MEMS Lab) ;
  • 배기덕 (삼성종합기술원MEMS Lab) ;
  • 최형 (삼성종합기술원MEMS Lab) ;
  • 고병천 (삼성종합기술원MEMS Lab)
  • 발행 : 2003.01.01
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초록

With the progress of optical communication technology recently, the development of micro actuator using MEMS technology has been made for optical switching. The actuation types are various; electrostatic, electromagnetic, and electrostatic +electromagnetic etc. Among them, the electrostatic type is the most popular because of the relative ease of fabrication, integration and shielding as well as low power consumption. However, it needs a high voltage to generate a larger driving force. To overcome this problem, we proposed a new type of electrostatic actuator with an extra vertical electrode in addition to the horizontal one. The vertical electrode also lays a role of making the stable angular rotation as a stopper. From the theoretical analysis and experiment, we find the actuation voltage can be reduced up to 50 % of that of the conventional one.

키워드

참고문헌

  1. Yongseop Yoon, Kideok Bae, and Hyung Choi, 2001 IEEE/LEOS Int. Conf. on Optical MEMS, 2001, pp.97-98
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  3. J. W. Judy, and R. S. Muller., 'Magnetically actuated, addressable microstructure,' J. of MEMS., Vol. 6, No.3, pp. 249-256, 1997 https://doi.org/10.1109/84.623114
  4. S.H. Crandal, N.C. Dahl and T.J. Lardner, An Introduction to the mechanics of Solids, McGraw-Hill
  5. J. Buhler, J. Funk, et al.,'Electrostatic Aluminum Micromirrors Using Double-Pass Metalization,' J. of MEMS., Vol. 6, No.2, pp. 126-135, 1997 https://doi.org/10.1109/84.585790