Abstract
This paper describes control principles of the piezoelectric ultrasonic motor which is operated by the ultrasonic vibration generated by the piezoelectric element. The piezoelectric ultrasonic motor has excellent characteristics such as compact size, noiseless motion, low speed, high torque and controllability, and has been recently applied for the practical utilization in industrial, consumer, medical and automotive fields. In this paper, the design of two-phase push-pull inverter for driving the piezoelectric ultrasonic motor is described, and a new control method of automatic resonant frequency tracking using PLL(Phase-Locked Loop) technique is mainly presented. the experimental results by this inverter system for driving the piezoelectric ultrasonic motor are illustrated herein. The inverter system with PLL technique improved the speed stability of the piezoelectric ultrasonic motor.
