Abstract
Generally, thrust force of double-sided LPM is more powerful than that of single-sided LPM. Also, double-sided LMP can be effectively applied to the high-precision position system with its simple control scheme. However, An equality between two airgap lengths Is a necessary condition for its high performance. If a little difference between two airgaps is existed, unbalanced normal force and undesirable vibration will be generated. Additionally, even though two airgap lengths are absolutely same, undesirable vibration can be generated because the direction of instantaneous normal force on mover is changed according to excitation methods. An effect of inequality of two airgap lengths is presented in this paper. Distribution of airgap permeance vs. relative displacement is analyzed by two dimensional finite element method. Excitation From this results, current waveforms to reduce the undesirable vibration is proposed.
