Transactions on Electrical and Electronic Materials

  • 제4권4호
  • /
  • Pages.30-35
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  • 2003
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  • 1229-7607(pISSN)
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  • 2092-7592(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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Structural Properties of Dielectric Barrier Reactor with Hole (DBH) for CF4 Decomposition

  • Jung Jung Gun (Department of Electrical and Electronic Engineering, Kyungnam University) ;
  • Kim Jong Suk (Department of Electrical and Electronic Engineering, Kyungnam University) ;
  • Park Jae Yoon (Department of Electrical and Electronic Engineering, Kyungnam University) ;
  • Kim Kwang Soo (Korea Electro Technology Research Institute) ;
  • Rim Geun Hie (Korea Electro Technology Research Institute)
  • 발행 : 2003.08.01
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초록

In this paper, the $CF_4$ decomposition efficiency is investigated for three simulated plasma reactors that are needle plate reactor, metal particle reactor, and dielectric barrier reactor with hole (DBH). The$CF_4$ decomposition efficiency by DBH is much better than that by needle plate reactor or metal particle reactor. When applied voltage is increased up to the critical voltage for spark formation in the all reactors, the $CF_4$ decomposition efficiency is increased. The $CF_4$ decomposition efficiency in needle plate reactor and metal particle reactor is about $12\%$ and $22\%$ respectively at applied voltage of 23 kV (consumption power: 110 W) and $CF_4$ concentration of 500 ppm, however, the $CF_4$ decomposition efficiency is more than $95\%$ in case of DBH. DBH should be much better than two reactors investigated for $CF_4$ decomposition.

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참고문헌

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