Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Magnetic Field Sensors using Co-base Amorphous Ribbon

Co계 아몰퍼스리본을 이용한 자계센서

  • Shin, Kwang-Ho (Dept. of Multimedia Engineering, Kyungsung University) ;
  • Park, Kyung-Il (Dept. of Electrinical Engineering, DongA University) ;
  • Song, Jae-Yeon (Dept. of Electrinical Engineering, BuKyung University) ;
  • Kim, Young-Hak (Dept. of Electrinical Engineering, BuKyung University) ;
  • SaGong, Geon (Dept. of Electrinical Engineering, DongA University)
  • 신광호 (경성대학교 멀티미디어공학과) ;
  • 박경일 (동아대학교 전기공학과) ;
  • 송재연 (부경대학교 전기공학과) ;
  • 김영학 (부경대학교 전기공학과) ;
  • 사공건 (동아대학교 전기공학과)
  • Published : 2003.09.30
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Abstract

To develop the highly sensitive Magneto-Impedance sensor, the amorphous ribbon was micro-processed to meander type sensor pattern, and its external magnetic field dependence of impedance was investigated. The impedance of the pattern had peak value at the magnetic field of 13 Oe and its changing ratio was about 170%. The impedance change per unit magnetic field was about 36% at bias field of 6 Oe, in which the output with high sensitivity and linearity could be obtained. The magnetic field resolution of the sensor module, which consist of the amorphous pattern and driving circuit, was about $10^{-3}$ Oe.

고감도의 자기임피던스센서를 구현하기 위해서 아몰퍼스리본을 리소그래피와 습식에칭을 통하여 미안더패턴으로 미소가공하고 임피던스의 외부자계의존성을 조사하였다. 센서의 임피던스는 외부자계 약 13 Oe 부근에서 가장 큰 값을 나타내었고, 약 170%의 변화율을 나타내었다. 선형성과 감도가 확보될 수 있는 외부자계영역(6 Oe부근)에서의 임피던스의 변화를 평가해 보면 약 36%의 단위자계당 임피던스 변화율을 확보할 수 있음을 알 수 있다. 제작한 센서패턴과 센서를 구동하기 위해서 제작된 구동회로를 이용하여 약 $10^{-3}$ Oe의 미약자계를 측정할 수 있다는 것을 알 수 있었다.

Keywords

References

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