PECVD에 의해 생성된 TIBN 박막의 특성

Properties of TiBN Films produced by PECVD

  • 허정 (동우열처리공업(주)) ;
  • 유용주 (울산대학교 지역협력 연구센터 기계부품 및 소재특성 평가 연구센터/첨단소재공학부)
  • Huh, J. (Dongwoo Heat treating Co., LTD.) ;
  • You, Y.Z. (RRC/ReMM, School of Mat. & Mat. Eng., University of Ulsan)
  • 투고 : 2002.02.28
  • 발행 : 2002.05.30

초록

During warm and hot forging process of steels or aluminum alloys, dies are subject to early fracture, severe wear by thermo-mechanical stress. Especially, during the die-casting of aluminum alloys, the service life of dies is incredibly lowered. In this study we investigated the characteristics of TiBN films produced by PECVD. TiBN films showed very high hardness, excellent wear resistance, which could enhance the service life of die parts such as forging punch, die casting core pin successfully.

키워드

과제정보

연구 과제 주관 기관 : 울산대학교

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