Journal of the Korean Crystal Growth and Crystal Technology (한국결정성장학회지)

The Korea Association of Crystal Growth (한국결정성장학회)
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La doping into $Pb(Zr,\;Ti)O_{3}$ capacitors on domain structures

  • Published : 2002.06.01
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Abstract

The ferroelectric domain variation and electrical performance of $Pb(Zr,Ti)O_{3}$ (PZT) based capacitors through La additions were systematically studied. La substitution up to 10 % was performed to lower the coercive and saturation voltages of epitaxial ferroelectric capacitors grown on Si using a (Ti_{0.9}Al_{0.1})N/Pt$ conducting barrier composite. Ferroelectric capacitors substituted with 10 % La show significantly lower coercive voltage compared to capacitors with 0 % and 3 % La. This is attributed to a systematic microstructure change into $180^{\circ}C$ domain and decrease in the tetragonality (i.e., c/a ratio) of the ferroelectric phase. These capacitors show promise as storage elements in low power memory architectures.

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References

  1. R. Ramesh, T. Sands and V.G. Keramidas, 'Domain Configuration Due to Multiple Misfit Relaxation Mechanisms in Epitaxial Ferroelectric Films', Materials Sci-ence and Eng. B22 (1994) 183
  2. A.L. Roytburd, 'REVIEW: Elastic Domains and Poly-domain Phases in Solids', Phase Transitions 45 (1993) 1
  3. B. Yang, S. Aggarwal, A.M. Dhote, T.K. Song and R. Ramesh, 'LSCO/PNZT/LSCO Thin Film Heterostruc-tures on Si using TiN/Pt Conducting Barrier', Appl. Phys. Lett. 71 (1997) 356
  4. C.G.F. Stenger and A.J. Burggraaf, 'Study of Phase Transitions and Properties of Tetragonal (Pb, La)(Zr, Ti)$O_3$ Ceramics-I', I. Phys. Chem. Solids 41 (1980) 17
  5. X. Dai, Z. Xu and D. Viehland, 'Normal to Relaxor Ferroelectric Transformations in Lanthanum-modified Tetragonal-structured Lead Zirconate Titanate Ceram-ics', I. Appl. Phys. 79 (1996) 1021
  6. X. Dai, Z. Xu, Jie-Fang Li and D. Viehland, 'Effects of Lanthanum Modification on Rhombohedral Pb($Zr_{1-\chi}Ti_\chi$) $O_3$ Ceramics: Part II', J. Mater. Res. 11 (1996) 626
  7. X. Dai, Z. Xu, Jie-Fang Li and D. Viehland, 'Effects of Lanthanum Modification on Rhombohedral Pb($Zr_{1-\chi}Ti_\chi$) $O_3$ Ceramics: Part I', J. Mater. Res. 11 (1996) 618
  8. B.A. Tuttle, T.J. Garino, J.A Voigt, T.J. Headley, D. Dimos and M.O. Eatough, 'Science and Technology of Electroceramic Thin Films', O. Auciello and R. Waser, Eds., Vol. 284 (Kluwer Academic, 1995) p. 117