DOI QR코드

DOI QR Code

열처리가 알루미나 나노기공의 배열에 미치는 영향

Effects of Heat Treatments of Aluminum Substrate on Nanopore Arrays in Anodic Alumina

  • 조수행 (국민대학교 신소재공학부) ;
  • 오한준 (한서대학교 재료공학과) ;
  • 김성수 (삼영전자공업(주)) ;
  • 주은균 (국민대학교 신소재공학부) ;
  • 유창우 (국민대학교 신소재공학부) ;
  • 지충수 (국민대학교 신소재공학부)
  • Cho, S.H. (School of Advanced Materials Engineering, Kookmin University) ;
  • Oh, H.J. (Dept. of Materials Engineering, Hanseo University) ;
  • Kim, S.S. (Samyoung Electronics Co., Ltd.) ;
  • Joo, E.K. (School of Advanced Materials Engineering, Kookmin University) ;
  • Yoo, C.W. (School of Advanced Materials Engineering, Kookmin University) ;
  • Chi, C.S. (School of Advanced Materials Engineering, Kookmin University)
  • 발행 : 2002.11.01

초록

To investigate effects of heat treatments including grain size control in substrate aluminum on nanopore arrays in anodic alumina template, aluminum was heat treated at $500^{\circ}C$ for 1h. The heat treated aluminum was anodized by two successive anodization processes in oxalic solution and the nanopore arrays in anodic alumina layer were studied using TEM and FE-SEM. The highly ordered porous alumina templates with 110 nm interpore distance and 40 nm pore diameter have been observed and the pore array of the anodic alumina has a uniform and closely-packed honeycomb structure. In the case of alumina template obtained from heat treated aluminum substrate, the well- ordered nanopore region in anodic alumina increased and became more homogeneous compared with that from non-heattreated one.

키워드

참고문헌

  1. G.D. Stucky, and J.E. Mac Dougall, Science, 247, 669 (1990) https://doi.org/10.1126/science.247.4943.669
  2. R.J. Tonucci, B.L. Justus, A.J. Campillo and C.E. Ford, Science, 258, 783 (1992) https://doi.org/10.1126/science.258.5083.783
  3. S. Kawai, and R. Ueda, J. Electochem. Soc., 122, 32 (1975) https://doi.org/10.1149/1.2134152
  4. T.-J. Cheng, J. Jarne, and J.-S. Gau, J. Electrochem. Soc., 137, 93 (1990) https://doi.org/10.1149/1.2086446
  5. Y.F. Cha, and Ruckenstein, J. Catalysis, 55, 281 (1978) https://doi.org/10.1016/0021-9517(78)90217-8
  6. G. Patermarakis, K. Moussiutzanis, and J. Chandrinos, Applied Catalysis, 180, 346 (1999)
  7. H. Masuda, and F. Hasegawa, J. Electrochem. Soc., 144, L128 (1997) https://doi.org/10.1149/1.1837634
  8. Y. Ki, H. Shimada, M. Sakairi, K. Shigyo, H. Takahashi, and M. Seo, J. Electochem. Soc., 144, 866 (1997) https://doi.org/10.1149/1.1837501
  9. H. Habazaki, P. Skeldon, G.E. Thompson, and G.C. Wood, Philos. Mag., 73, 297 (1996) https://doi.org/10.1080/01418639609365826
  10. G.S. Park, Bulletin of the Korea Inst. of Met. & Mat., 9, 589 (1996)
  11. H. Masuda, and K. Fukuda, Science, 268, 1466 (1995) https://doi.org/10.1126/science.268.5216.1466