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Journal of Korean Vacuum Science & Technology
Volume 6 Issue 4
/
Pages.158-161
/
2002
/
1226-6167(pISSN)
The Korean Vacuum Society (한국진공학회)
Introduction of the Oil-Free Scroll Vacuum Pump
Haga, Shuji
(Vacuum Pump Dep., Anest Iwata Corporation)
Published : 2002.12.01
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