Journal of Korean Vacuum Science & Technology
- 제6권3호
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- Pages.120-125
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- 2002
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- 1226-6167(pISSN)
Screen printed contacts formation by rapid thermal annealing in multicrystalline silicon solar cells
- Kim, Kyung hae (School of Electrical and Computer, Engineering, Sungkyunkwan University) ;
- U. Gangopadhyay (School of Electrical and Computer, Engineering, Sungkyunkwan University) ;
- Han, Chang-Soo (School of Electrical and Computer, Engineering, Sungkyunkwan University) ;
- K. Chakrabarty (PSE Ins.) ;
- J. Yi (School of Electrical and Computer, Engineering, Sungkyunkwan University)
- 발행 : 2002.09.01
초록
The aim of the present work is to optimized the annealing parameter in both front and back screen printed contacts realization on p-type multicrystalline silicon and with phosphorus diffused. The RTA treatments were carried out at various temperatures from 600 to 850
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