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다층박막에서의 입사광과 반사광의 광로정변화

The variation of optical pass length between incident and reflective beam in multilayer thin film

  • 김문환 (신라대학교 공과대학 자동차기계공학과) ;
  • 최영규 (신라대학교 공과대학 광전자공학과)
  • 발행 : 2002.12.01

초록

광학 반사경에서 일어나는 입사광과 반사광의 광로정변화와 분위기변화와의 관계를 조사했다. 분위기 변화요소로는 기압, 온도, 습도 그리고 $CO_2$함유량 등을 예로 들었다. 이들의 변화에 따른 광로정 변화치의 측정기법을 개발하여 실험 결과로부터 광로정 변화치를 정량화할 수 있음을 보였으며. 습도변화가 광로정의 변화에 가장 큰 영향을 미친다는 것을 확인하였다.

The variation of the optical pass length between incident and reflective beam in a multilayer thin film reflection mirror is investigated. This variation is caused mainly by environmental parameters around the optical system, such as the air pressure, temperature, humidity and $CO_2$concentration. In this paper, a new method for measuring optical pass length variation is proposed. This optical pass length is measured against the above parameters by experiment. From the experimental results, it is clarified that the optical pass length is mostly effected by humidity changes.

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참고문헌

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