대한전자공학회논문지SD (Journal of the Institute of Electronics Engineers of Korea SD)

대한전자공학회 (The Institute of Electronics and Information Engineers)
권호 표지

PLT 박막에서 조성에 따른 동적 초전특성의 주파수 의존성에 관한 연구

A Study on the Effects of the La Concentration on the Frequency Dependence of Dynamic Pyroelectric Properties of PLT Thin Films

  • 차대은 (인하대학교 전자재료공학과) ;
  • 장동훈 (인하대학교 전자재료공학과) ;
  • 강성준 (여수대학교 반도체·응용물리학과) ;
  • 윤영섭 (인하대학교 전자재료공학과)
  • 발행 : 2002.10.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

Modulation frequency dependences of the pyroelectric properties of PLT (P $b_{1-x}$ L $a_{x}$ $Ti_{1-x}$ 4/ $O_3$) thin films with La concentrations of 5, 10 and 15㏖% have been investigated by using the dynamic method. The PLT thin film with 10㏖% of the La concentration (PLT(10) thin film) shows the most excellent pyroelectric properties among the films. For PLT(10) thin film, the pyroelectric coefficient shows the maximum value of 6.6$\times$10$^{-9}$ C/$\textrm{cm}^2$ㆍK without frequency dependence. The figure of merits for the voltage responsivity and specific detectivity are 1.03$\times$10$^{-11}$ Cㆍcm/J and 1.46$\times$10$^{-9}$ Cㆍcm/J, respectively. Voltage responsivity corresponding to the pyroelectric voltage is almost constant at low modulation frequency and decreases in proportional to frequency at high modulation frequency. Voltage responsivity is 5.15 V/W at 8Hz. Noise equivalent power (NEP) and specific detectivity ( $D^{*}$) of the PLT(10) thin film are 9.93$\times$10$^{-8}$ W/H $z^{1}$2/ and 1.81$\times$10$^{6}$ cmH $z^{1}$2/W at the frequency of 100Hz, respectively. The results indicate that PLT(10) thin film is very suitable for pyroelectric IR sensors.s.s.

키워드

참고문헌

  1. D. H. Chang, Y. S. Yoon and S. J. Kang, 'Study of the Switching Characteristics of PLT(10) Thin Films', J. Kor. Phys. Soc., Vol. 38, No. 3, pp. 277-281, March 2001
  2. M. Okuyama and Y. Hamakawa, '$PbTiO_3$ Ferroelectric Thin Films and Their Pyroelectric Application', Ferroelectrics, Vol. 118, pp. 261-278, 1991 https://doi.org/10.1080/00150199108014765
  3. N. Nagao, T. Takeuchi and K. Iijima, 'Preparation and Properties of (Pb,La) $TiO_3$ Pyroelecytric Thin Films by RF-Magnetron Sputtering', Jpn. J. Appl. Phys., Vol. 32, pp. 4065-4068, 1993 https://doi.org/10.1143/JJAP.32.4065
  4. C. M. Wang, Y. C. Chen, M. S. Lee and J. W. Wu, 'The Properties of Lead Titanate Thin Films Derived from a Dio-Based Sol-Gel Processes', Jpn. J. Appl. Phys., vol. 37, pp. 951-957, 1998 https://doi.org/10.1143/JJAP.37.951
  5. K. K. Kyaw Soe, M. Maeda and I. Suzuki, ' Sol-Gel Processing of Pb₁$_xLa_xTi_1\;_{x/4}O_3$ Thin Films', Jpn. J. Appl. Phys., Vol. 35, pp. 205-209, 1996 https://doi.org/10.1143/JJAP.35.205
  6. K. Iijima, R. Takayama, Y. Tomita and I. Ueda, 'Epitaxial Growth and the Crystallographic, Dielectric, and Pyroelectric Properties of Lanthanum-modified Lead Titanate Thin Films', J. Appl. Phys., Vol. 60, pp. 2914-2919, 1986 https://doi.org/10.1063/1.337078
  7. M. Kobune, S. Jujii, K. Akarmatsu and R.Takayama, 'Pyroelectric Properties of La-and Mg-Modified $PbTiO_3$ Thin Films', J. Ceram. Soc. Jap., Vol. 103, pp. 515-518, 1995 https://doi.org/10.2109/jcersj.103.515
  8. R. Takayama, and Y. Tomita, 'Pyroelectric Properties and Application to Infrared Sensors of $PbTiO_3;\;PbLaTiO_3\;PbZrTiO_3$ Ferroelectric Thin Films', Ferroelectrics, Vol. 118, pp. 325, 1991 https://doi.org/10.1080/00150199108014770
  9. Y. Shimkizu, K. R. Udayakumar and L. Eric Cross, 'Preparation and Electrical Properties of Lanthanum-Doped Lead Titanate Thin Films by Sol-Gel Processing', J. Am. Cerm. Soc., Vol. 74, pp. 3023-3027, 1991 https://doi.org/10.1111/j.1151-2916.1991.tb04296.x
  10. A. G. Chynoweth, 'Dynamic Method for measuring the Pyroelectric of Effect with Special Reference to Barium Titanate', J. Appl. Phys., Vol. 27, pp. 78-84, 1956 https://doi.org/10.1063/1.1722201
  11. R. Takayama, Y. Tomita, K. Iijima and I. Ueda, 'Preparation and Characteristics of Pyroelectric infrared Sensors Made of c-axis oriented La-Modified $PbTiO_3$ Thin Films', J. Appl. Phys., Vol. 61, pp. 411-415, 1987 https://doi.org/10.1063/1.338839
  12. M. Kohli, C. Wuethrich, K. Brooks, B. Wiling, M. Forster, P. Muralt, N. Setter and P. Ryser, Sens. & Actuat. A, Vol. 60, pp. 147, 1997 https://doi.org/10.1016/S0924-4247(97)01484-2
  13. C. M. Wang, Y. C. Chen, M. S. Lee and J.W. Wu, 'Pyroelectric Properties of La-modified Lead Titanate Thin Film Detectors', Jpn. J. Appl. Phys., Vol. 38, pp. 2831-2834, 1999 https://doi.org/10.1143/JJAP.38.2831
  14. K. No, C. G. Choi, D. S. Yoon, T. H. Sung, Y. C. Kim, I. S. Jeong and W. J. Lee, 'Pyroelectric Properties of Sol-Gel Derived Lanthanum Modified Lead Titanate Thin Films', Jpn. J. Appl. Phys., Vol. 35, pp. 2731-2733, 1996 https://doi.org/10.1143/JJAP.35.2731
  15. S. J. Kang, D. H. Chang and Y. S. Yoon, 'Fatigue and Dielectric Properties of the (Pb,La)$TiO_3$ Thin Films with Various La Concentrations', Thin Solid Films, Vol. 373, pp. 53-59, 2000 https://doi.org/10.1016/S0040-6090(00)01104-4
  16. G.Teowee, J. M. Boulton C. D. Baerthein, R. K. Wade and D.R. Uhlmann, 'Electrical Properties of Sol-Gel Derived La-Doped $PbTiO_3$-Coating Films', Integrated Ferroelectrics, Vol. 4, pp. 231, 1994 https://doi.org/10.1080/10584589408017026
  17. R. W. Whatmore, 'Pyroelectric Ceramics and Devices for Thermal Infra-Red Detection and Imaging', Ferroelectrics, Vol. 118, pp. 241-259, 1991 https://doi.org/10.1080/00150199108014764