MEMS 설계 및 해석 기술동향

References

1. Journal of the KSME v.41 no.12 MEMS 기술개발현황 및 산업화 계획 조영호
2. Methodology for the modeling and simulation of microsystems Bartlomiej F. Romanowicz
3. Proceedings of the IEEE v.86 no.8 CAD challenges for Microsensors, Microactuators, and Microsystems S. D. Senturia
4. Technical Proceedings of the MSM 2000 International Conference on Modeling and Simulation of Microsystems GEODESIC: A New and Extensible Geometry Tool and Framework with Application to MEMS N. Wilson;K. Wang;D. Yergeau;R. W. Dutton
5. The MASS Group at UIUC - Main Page
6. The MISTIC TCAD Home Page
7. Sensors and Actuators v.A32 A simulation tool for mechanical sensor design(SENSOR) B. Folkmer(et al.)
8. IEEE Transactions on Electron Devices v.ED-29 SENSIM:: A simulation program for solid state pressure sensors K. W. Lee;K. D. Wise
9. Proceedings of the IEEE MEMS CAEMEMS: An Integrated Computer-Aided Engineering Workbench for Micro-Electro-Mechanical Systems S. Crary;Y. Zhang
10. Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems SESES: a comprehensive MEMS modelling systems J. G. Korvink(et al.)
11. Proceedings IEEE Micro Electro Mechanical Systems 3D coupled electromechanics for MEMS: applications of CoSolve-EM J. R. Gilbert(et al.)
12. Journal of Microelectromechanical Systems v.1 no.1 A Computer-Aided Design System for Microelectromechanical System(MEMCAD) S. D. Senturia;R. M. Harris;B. P. Johnson;Songmin Kim;K. Nabors;M. A. Shulman;J. K. White
13. WESCON/'95. Conference record. 'Microelectronics Communications Technology Producing Quality Products Mobile and Portable Power Emerging Technologies IntelliCAD: the CAD for MEMS F. Maseeh
14. Journal of Microelectromechanical Systems v.6 no.1 SOLIDS:A Tool for Microactuator Simulation in 3-D J. M. Funk;J. G. Korvink;J. Buhler;M. Bachtold;H. Baltes
15. M&MEMS - A Millennium-based MEMS Simulator
16. Open and flexible simulation software solutions for every phase of product design ANSYS Inc.
18. Journal of Microelectromechanical Systems v.6 Equivalent circuit representation of electromechanical transduces: I: lumped-parameter system(micromechanical) Harrie A. C. Tilmans
19. J. M. Berg. (). Levia, J. Rouillard VHDL-A Design Objectives and Rationale C. -J. R. Shi;Alian Vachoux
20. Journal of Microelectromechical Systems v.9 no.2 Computer-Aided Generation of Nonlinear Reduced-Order Dynamic Macromodels - I: Non-Stress-Stiffened Case J. E. Mehner(et al.)