Abstract
High-speed probe made to test single flux quantum(SFQ) circuits was comprised of semi-rigid coaxial cables and microstrip lines. The impedance was set at 50 $\Omega$to carry high-speed signals without much loss. To do performance test of high-speed probe, we have attempted to fabricate a test chip which has a coplanar waveguide(CPW) structure. Electromagnetic simulation was done to optimize the dimension of CPW so that the CPW structure has an impedance of 50$\Omega$, matching in impedance with the probe. We also used the simulation to investigate the effect of the width of signal line and the gap between signal line and ground plane to the characteristics of CPW structure. We fabricated the CPW structure with a gold film deposited on Si wafer whose resistivity was above $1.5\times$10$_4$$\Omega$.cm. The magnitudes of S／sub 21／ of CPW at 6 ㎓ in simulations and in the actual measurements done with a network analyzer were: -0.1 ㏈ and -0.33 ㏈ (type A),-0.2 ㏈ and -0.48 ㏈ (type B), respectively. Using the test chip, we have successfully tested the performance of high-speed probe made for SFQ circuits. The probe showed the good performance overthe bandwidth of 10 ㎓.
