Journal of Korean Vacuum Science & Technology

한국진공학회 (The Korean Vacuum Society)
권호 표지

Microstructure and Properties of Er-SiOX Films Synthesized by ion Beam Assisted Deposition

  • Duan, Gao-Song (State Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology) ;
  • Zheng, Shu-Qing (State Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology) ;
  • Zhang, Xiao-Juan (State Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology) ;
  • Qing Yu (State Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology) ;
  • Wang Liang (Institute of Materials Technology, Dalian Maritime University)
  • 발행 : 2002.12.01
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초록

Er doped SiOx films have been synthesized by ion beam assisted deposition (IBAD). The morphology and microstructure of films and their annealing behaviors have been examined by using scanning electron microscopy and x-ray diffraction. The composition and properties of films have been systematically investigated.

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