Journal of Korean Vacuum Science & Technology
- Volume 6 Issue 2
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- Pages.55-57
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- 2002
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- 1226-6167(pISSN)
MEVVA ion Source And Filtered Thin-Film Deposition System
- Liu, A.D. (The Institute of Low Energy Nuclear Physics, key Laboratory in University of Radiation Beam Technology & Material Modification, Beijing Radiation Center Beijing Normal University) ;
- Zhang, H.X. (The Institute of Low Energy Nuclear Physics, key Laboratory in University of Radiation Beam Technology & Material Modification, Beijing Radiation Center Beijing Normal University) ;
- Zhang, T.H. (The Institute of Low Energy Nuclear Physics, key Laboratory in University of Radiation Beam Technology & Material Modification, Beijing Radiation Center Beijing Normal University) ;
- Zhang, X.Y. (The Institute of Low Energy Nuclear Physics, key Laboratory in University of Radiation Beam Technology & Material Modification, Beijing Radiation Center Beijing Normal University) ;
- Wu, X.Y. (The Institute of Low Energy Nuclear Physics, key Laboratory in University of Radiation Beam Technology & Material Modification, Beijing Radiation Center Beijing Normal University) ;
- Zhang, S.J. (The Institute of Low Energy Nuclear Physics, key Laboratory in University of Radiation Beam Technology & Material Modification, Beijing Radiation Center Beijing Normal University) ;
- Li, Q. (The Institute of Low Energy Nuclear Physics, key Laboratory in University of Radiation Beam Technology & Material Modification, Beijing Radiation Center Beijing Normal University)
- Published : 2002.12.01
Abstract
Metal-vapor-vacuum-arc ion source is an ideal source for both high current metal ion implanter and high current plasma thin-film deposition systems. It uses the direct evaporation of metal from surface of cathode by vacuum arc to produce a very high flux of ion plasmas. The MEVVA ion source, the high-current metal-ion implanter and high-current magnetic-field-filtered plasma thin-film deposition systems developed in Beijing Normal University are introduced in this paper.
Keywords