Journal of the Institute of Electronics Engineers of Korea SD (대한전자공학회논문지SD)

The Institute of Electronics and Information Engineers (대한전자공학회)
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Pyroelectric Properties of the $\beta$-PVDF (Poly(vilnylidene fluoride)) Thin Film Prepared by Vacuum Deposition with Applying Electric Field

전계인가 진공 증착법으로 제작된$\beta$ -PVDF (Poly(vinylidene fluoride)) 박막의 초전 특성

  • Chang, Dong-Hoon (Shool of Electronic and Electrical Engineering, Inha Univ) ;
  • Kang, Seong-Jun (Dept. of Semiconductor and Applied Physics, Yosu National Univ.) ;
  • Yoon, Yung-Sup (Shool of Electronic and Electrical Engineering, Inha Univ)
  • 장동훈 (인하대학교 전자전기공학부) ;
  • 강성준 (여수대학교 반도체응용물리학과) ;
  • 윤영섭 (인하대학교 전자전기공학부)
  • Published : 2002.05.01
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Abstract

The PVDF (Polyvinylidene Fluoride) thin film having P phase is prepared by the vacuum deposition with applying the electric field and its pyroelectric properties are studied by using a dynamic method to examine the possibility of the application to the pyroelectric IR sensor. The pyroelectric responses of the PVDF thin film are characterized as the frequency dispersion in both low and high modulation frequency regions, and their frequency dependences are observed. In the low frequency region (2~10Hzz), the polarization can easily rotate with the increase of modulation frequency and show the maximum since the reorientation rate of domains is higher than the modulation frequency. On the other hand, in the high frequency region (100~1000Hz), the pyroelectric response decreases as the frequency increases, because the reorienatation rate of domains is suppressed and thus, the change of polarization decreases. Pyroelectric coefficient, figure of merits for noise equivalent power and detectivity of the PVDF thin film are measured as 3.2$\times$10$^{-10}$ C/$\textrm{cm}^2$.K, 2.34$\times$10$^{-10}$ C.cm/J and 1.32$\times$10$^{-9}$ C.cm/J, respectively. Also, the noise equivalent and the detectivity are 1.66$\times$10$^{-7}$ W/H $z^{$\sfrac{1}{2}$}$, 6.03$\times$10$^{5}$ cm.H $z^{$\sfrac{1}{2}$}$W, respectively.

전계인가 진공증착법으로 β상을 가지는 PVDF (Polyvinylidene Fluoride) 박막을 제작한 후, dynamic 방법으로 초전 특성을 측정하여 초전형 적외선 센서의 응용가능성에 대하여 조사하였다. PVDF 박막의 응답특성이 저주파와 고주파 영역에 따른 변조 주파수의 주파수 분산 (dispersion)으로 고려되었고, 그에 따른 초전 특성의 주파수 의존성을 관찰하였다. 저주파 (2∼100㎐) 영역에서 분역의 재배향 (reorientation) 되는 속도는 변조주파수의 속도보다 빠르므로 분극의 변화량이 증가하여 최대 값을 나타낸다. 반면에 고주파 (100∼1000㎐) 영역에서 분역의 재배향은 주파수 증가에 따라 방해를 받아 분극의 변화량이 억제되어 초전 응답이 감소하는 것을 알 수 있다. 초전계수와 전압감도 및 비검출능을 위한 재료평가지수는 각각 3.2×10/sup -10/C/㎠·K, 2.34×10/sup -10/C·cm/J 1.32×10/sup -9/C·cm/J이었고, 잡음등가전력과 비검출능은 각각 1.66×10/sup -7/W/㎐/sup ½/, 6.03×10/sup 5/cm·㎐/sup ½/W로 나타났다.

Keywords

References

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