대한전자공학회논문지SD (Journal of the Institute of Electronics Engineers of Korea SD)

대한전자공학회 (The Institute of Electronics and Information Engineers)
권호 표지

Effects of Excess Lead Addition on Sol-Gel Derived ($Pb_{0.9}La_{0.1}$)$Ti_{0.975}O_3$(PLT (10)) Thin Film

  • 김성진 (인하대학교 전자재료공학과) ;
  • 정양희 (여수대학교 전기 및 반도체공학과) ;
  • 윤영섭 (인하대학교 전자재료공학과)
  • 발행 : 2002.03.01
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초록

Sol-gel 법으로 제작한 (Pb/sub 0.9/La/sub 0.1/)Ti/sub 0.975/O₃(PLT (10)) 박막의 구조적 및 전기적 특성에 대한 과잉 Pb 첨가량이 미치는 영향을 조사하였다. DTA 와 X-선 회절분석 결과, 과잉 Pb 첨가량이 7.5 에서 15㏖%로 증가함에 따라, PLT(10) 박막의 결정화 온도는 감소하였으며, (100) 우선 배향성은 증가하였다. 또한, PLT(10) 박막의 과잉 Pb 첨가량에 따른 전기적 특성을 조사한 결과, 12.5㏖% 의 과잉 Pb 를 첨가한 박막이 가장 우수한 전기적 특성을 나타내었다. 이때, 비유전률과 유전손실은 각각 350 과 0.02 이었고, 100㎸/㎝ 에서 누설전류밀도는 1.27×10/sup -6/A/㎠ 이었다. 또한 이력곡선으로부터 구한 잔류분극(p) 과 항전계 (Ec) 는 각각 6.36μC/㎠ 와 58.7㎸/㎝ 이었으며, ±5V 의 사각펄스를 10/sup 9/회 인가한 후에도 잔류 분극값이 초기값의 약 15% 감소하는 비교적 우수한 피로특성을 나타내었다. 이상의 결과로부터, 과잉 Pb 첨가량이 12.5㏖% 인 PLT(10) 박막은 비휘발성 메모리에 응용될 수 있는 매우 유망한 재료임을 알 수 있었다.

In order to study electric properties of (Pb$\_$0.9/La$\_$0.1/)Ti$\_$0.975/O$_3$(PLT (10)) films with varying excess lead concentration (7.5, 10, 12.5, 15 ㏖% excess lead), the PLT films were deposited by sol-gel process. DTA analyses reveal that the crystallization temperature of the precursor powers decreased with increasing amount of excess lead. XRD patterns of PLT reveal pure perovskite structure and the preferred orientation increased with increasing Pb content in the films. With increasing amount of excess P$\_$b/, the relative permittivity ($\xi$$\_$r/) increased and leakage current density at 100 ㎸/cm transformed 4.01$\times$10$\^$-5/, 2.42$\times$10$\^$-6/, 1.27$\times$10$\^$-6/, 1.56$\times$10$\^$-6/A/㎠ respectively. In the results of hysteresis loops measured at 166 kV/cm, the remanent polarization (P$\_$r/) and the coercive field (E$\_$c) are 6.36$\mu$C/cm and 58.7 ㎸/cm, respectively (at 12.5 ㏖% excess P$\_$b/) With increasing amount of excess Pb, the remanent polarization for PLT thin film degraded to about 44%, 27%, 15%, 16% of the initial value after 10$\^$9/ cycles./TEX>) With increasing amount of excess Pb, the remanent polarization for PLT thin film degraded to about 44%, 27%, 15%, 16% of the initial value after $10^{9}$ cycles.

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