Abstract
This paper presents a development of high accuracy aligner and describes a method to find the orientation of a substantially circular disk shaped wafer with at least one flat region on an edge thereof. In the developed system, the wafer is spun one 360 degree turn on a chuck and the edge position is measured by a linear array to obtain a set of data points at various wafer orientation. The rotation axis may differ from wafer center by an unknown eccentricity. The flat angle is found by fitting a cosine curve to the actual data to obtain a deviation. The maximum deviation is then corrected for errors due to a finite number of data points and wafer eccentricity by calculating an adjustment angle from data points on the wafer fiat. After determining the flat angle the wafer is spun to the desired orientation. The wafer eccentricity can be calculated from four of the data points located away from the flat edge region. and the wafer is then centered.
