한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제19권10호
  • /
  • Pages.156-162
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  • 2002
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

CMP특성과 온도의 상호관계에 관한 연구

A Study on the Correlation between Temperature and CMP Characteristics

  • Gwon, Dae-Hui (Dept.of Precision Mechanical Engineering, Graduate School of Busan National University) ;
  • Kim, Hyeong-Jae (Dept.of Precision Mechanical Engineering, Graduate School of Busan National University) ;
  • Jeong, Hae-Do (Busan National University) ;
  • Lee, Eung-Suk (Korea Institute of Machinery and Materials) ;
  • Sin, Yeong-Jae (Korea Institute of Machinery and Materials)
  • 발행 : 2002.10.01
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초록

There are many factors affecting the results of CMP (Chemical Mechanical Polishing). Among them, the temperature is related to the removal rate and WIWNU (Within Wafer Non-Uniformity). In other words, the removal rate is proportional to the temperature and the variation of temperature distribution on a pad affects the non-uniformity within a wafer. In the former case, the active chemistry improves the rate of chemical reaction and the removal rate becomes better. But, there are not many advanced studies. In the latter case, a kinematical analysis between work-piece and pad can be obtained. And such result analysed from the mechanical aspect can be directly related to the temperature distribution on a pad affecting WIWNU. Meanwhile, the temperature change affects the quantities of both slurry and pad. The change of a pH value of the slurry chemistry due to a temperature variation affects the surface state of an abrasive particle and hence the agglomeration of abrasives happens above the certain temperature. And the pH alteration also affects the zeta potential of a pad surface and therefore the electrical force between pad and abrasive changes. Such results could affect the removal rate and etc. Moreover, the temperature changes the 1st and 2nd elastic moduli of a pad which are closely related to the removal rate and the WIWNU.

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참고문헌

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