ICROS (제어로봇시스템학회지)

Institute of Control, Robotics and Systems (제어로봇시스템학회)
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Modeling and Control of Thermal Microsystems a Case Study

  • 성수완 (한국과학기술원 생명화학공학과 초미세 화학공정시스템 연구센터) ;
  • 박선원 (한국과학기술원 생명화학공학과 초미세 화학공정시스템 연구센터) ;
  • 윤대성 (삼성종합기술 Biochip Project Team and MEMS Lab) ;
  • 임근배 (삼성종합기술 Biochip Project Team and MEMS Lab)
  • Published : 2002.07.01
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Abstract

Keywords

References

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