Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
권호 표지

A Study on the Mechanism of Micro-ECM by Use of Point Electrode Method

점 전극을 이용한 마이크로 전해가공 기구에 관한 연구

  • 김봉규 (울산대학교 기계자동차 공학부 대학원, 일진오토모티브 기술연구소) ;
  • 전종업 (울산대학교 기계자동차 공학부) ;
  • 박규열 (울산대학교 기계자동차 공학부)
  • Published : 2002.08.01
Download PDF
⟨ Previous Next ⟩

Abstract

This research aimed at from the establishment of theory on micro electrochemical machining mechanism to the implementation of a practical fabrication system of micro parts. In detail, the mechanism of micro-ECM was investigated with potentiodynamic method and the optimal condition for micro-ECM was selected by voltage-current-time curve with potentiostatic method. From the experimental result, the micro part which has extremely fine surface could be fabricated by use of micro-ECM with point electrode method.

Keywords

References

  1. 近森邦夫, '電解加工におけるパルス電氣の利用,' 日本機械技術硏究所報告, No. 137, 1986
  2. J. W. Schultze, A. Bressel, 'Principle of electrochemical micro-and nano-system technologies,' Electrochimica Acta 47, pp. 3-21, 2001 https://doi.org/10.1016/S0013-4686(01)00584-9
  3. K. Chikamori, 'Possibilities of electrochemical micromachining,' Int. J. of Jpn. Soc. Prec. Eng., Vol. 32, No. 1, pp. 37-42, 1998
  4. 木光太朗, 酒井茂紀, 增澤隆久, 藤野正俊, '微細穴の電解仕上げに關する硏究,' 電氣加工學會全國大會論文集, pp. 35-38, 1996
  5. T. Masuzawa, S. Sakai, 'Quick finishing of WEDM products by ECM using a mate-electrode,' Ann. of the CIRP, Vol. 36, No. 1, pp. 123-126, 1987 https://doi.org/10.1016/S0007-8506(07)62568-2
  6. V. Kirchner, L. Cagnon, R. Schuster, G. Ertl, 'Electrochemical machining of stainless steel microelements with ultrashort voltage pulse,' App. Phys. Lett., Vol. 79, pp. 1721-1723, 2001 https://doi.org/10.1063/1.1401783
  7. R. Schuster, 'Nanoscale electrochemistry-a tool for forming structures of almost atomic dimensions,' Phys. Rev. Lett., Vol. 80, pp. 5599-5602, 1998 https://doi.org/10.1103/PhysRevLett.80.5599
  8. R. Schuster, V. Kirchner, P. Allongue, G. Ertl, 'Electrochemical micromachining,' Science, Vol. 289, pp. 98-101, 2000 https://doi.org/10.1126/science.289.5476.98
  9. 인치현, 김규만, 주종남, '전기화학적 에칭을 이용한 텅스템 미세탐침 가공,' 한국정밀공학회지, Vol. 18, No. 2, pp. 111-118, 2001
  10. 임영모, 임형준, 김수현, '전해 프로세스를 이용한 미세축 제작,' 한국정밀공학회지, vol. 18, No. 3, pp. 169-174, 2001
  11. 박용수, 금속부식, 대우학술총서, 民音社, pp. 137-148
  12. 佐藤敎男, '金屬の不動態化と表面不動態皮膜,' 電氣化學, Vol. 46, No. 11, pp. 584-591, 1978