Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
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Feasibility Study of General-purpose Precision Stage Using A Novel Contact-Free Surface Actuator Based on Magnetic Suspension Technology

자기 흡인식 부상 원리에 기초한 비접촉식 서피스 액추에이터의 초정밀 범용 스테이지에의 적용 가능성

  • Jeong, Gwang-Sik (Dept.of Mechanical Engineering, Graduate School of Yonsei University) ;
  • Lee, Sang-Heon (Dept.of Mechanical Engineering, Graduate School of Yonsei University) ;
  • Baek, Yun-Su (Dept.of Mechanical Electronics Engineering, Yonsei University)
  • 정광식 (연세대학교 대학원 기계공학과) ;
  • 이상헌 (연세대학교 대학원 기계공학과) ;
  • 백윤수 (연세대학교 기계전자공학부)
  • Published : 2002.03.01
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Abstract

The precision stage using a novel contact-free planar actuator based on magnetic farces, magnetized force and Lorentz farce, is suggested. In the promising magnetic structure, the mover is driven directly without any transmission mechanism, and doesn't need any auxiliary driver for its posture calibration. Then it is estimated that the proposed operating principle is very suitable for work requiring high accuracy and cleanness, or general-purpose nano-stage. In this paper, we discuss a driving principle of the planar system including the magnetic force generation mechanism, a framework for the force model, governing characteristics of the levitated plate, and a planar motion control of the constructed prototype. And experimental results are given to verify the derived theoretical model and a feasibility of the system.

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References

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