대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

p-HP 고분자 LB초박막의 제작과 전기적 특성

Electrical Properties and Fabrication of Ultra-thin Films using p-HP Polymer

  • 유승엽 (동아대학교 전기공학과) ;
  • 정상범 (동아대학교 전기공학과) ;
  • 박재철 (영진전문대학 전자정보계열.) ;
  • 권영수 (동아대학교 전기공학과.)
  • 발행 : 2002.07.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

We fabricated the crosslinked films using p-hexadecoxyphenol (p-HP), which is amphiphilic and can form polyion complexes with formaldehyde at the air-water interface. The behavior of polyion complexation at the air-water interface and the surface structure of LB films was investigated by Brewster angle microscope(BAM) and scanning Maxwell-stress microscope (SMM), respectively. Also, the electrical properties for crosslinking in phenol-formaldehyde LB films were investigated by measuring conductivity and dielectric constant. The conductivities of p-HP LB films are as follows: heat-treatment of 1% formaldehyde subphase(3.76$\times$10$^{-15}$ ~4.76$\times$10$^{-1}$5[S/cm])$\times$10$^{-14}$ ~1.74$\times$10$^{-14}$ [S/cm]). Also, relative dielectric constants of p-HP LB films were reduced from 6.76~7.84 (pure water) to 2.97~3.25 (heat-treatment of 1% formaldehyde subphase))

키워드

참고문헌

  1. S. Mikoshiba and S. hayase, 'Preparation of low density poly(methylsilsesquioxane)s for LSI interlayer dielectrics with low dielectric constant. Fabrication of Angstrom size pores prepared by baking trifluoropropylsilyl copolymers', J Mater. Chem., Vol. 9, pp.591-598, 1999 https://doi.org/10.1039/a807068g
  2. K. Endo and T. Tatsumi, 'Controlling fluorine concentration of fluorinated amorphous carbon thin films for low dielectric constant interlayer dielectric'. Jpn. J Appl, Phys., Vol. 36 pp.Ll531-Ll533, 1997 https://doi.org/10.1143/JJAP.36.L1531
  3. D. T. Price, R. J. Gutmann and S. P. Murarka, 'Damascene copper interconnects with polymer ILDs', Thin Solid Films, Vol. 308-309, pp.523-528, 1997 https://doi.org/10.1016/S0040-6090(97)00479-3
  4. S. P. Murarka, 'Low dielectric constant materials for interlayer dielectric applications', Solid State Technology, Vol. 39, pp.83-90, 1996 https://doi.org/10.1016/0038-1101(95)00093-9
  5. H. G. Elaias, 'Macromolecules 2', Plenum press, New york, 1977
  6. J. U. Kim, B. J. Lee and Y. S. Kwon, 'A two-dimentional network of phenol-formaldehyde monolayers by the Langmuir- Blodgett technique', Thin Solid Films, Vol. 327-329, pp.486-490, 1998 https://doi.org/10.1016/S0040-6090(98)00693-2
  7. 유승엽, 정상범, 박재철, 권영수, '말레에이트계 공중합체LB막 MIM소자의 전기 및 유전 특성', 전기학회논문지, 제46권 8호, pp. 1184-1188, 1997
  8. S. Y. Yoo, S. B. Jung, J. C. Park and Y. S. Kwon, 'Dielectric Properties of Maleate Copolymer LB Films Using MIM Device', Journal of the Korean Physical Society, Vol. 32, pp.S1087-51088, 1998