참고문헌
- http://www.sec.co.kr
- http://www.lg.co.kr
- http://www.lg.co.kr
- http://www.motorola.com
- http://www.analog.com/technology/RFComms/cellularHandsets/index.html
- www.analog.com/industry/umic/relay.html
- C. Bozler, R. Drangrneister, S. Duffy, M. Gouker, J. Knecht, L. Kushner, R. Parr, S. Rabe, and L. Travis, 'MEMS microswitch arrays for reconfigurable distributed microwave components', Microwave Symposium Digest 2000 IEEE MTT-S International, vol. 1, pp. 153-156. 2000
- D. Hynan, A. Schmitz, B. Wameke, T. Y, Hsu, J. Lam, J. Brown, J. Schaffhcr, A. Walston, R. Y. Loo, G. L. Tangonan, M. Mehregany, and J. Lee, 'GaAs-compatible surface-micromachined RF MEMS switches', Electmmcs Letters, 35, 3, pp. 224-226, february 4, 1999 https://doi.org/10.1049/el:19990032
- D. J. Young, and B. E. Boser, 'A micromachined variable capacitor for Monolithic low-noise VCOs', in Proceedings of 1996 SoIid-State Sensor and Actuator Workshop, IIilton Head Island, 86-89, 1996
- Z. Feng, W. Zhang, B. Su, K. F. Harsh, K. C. Gupta, V. Bright, and Y. C. Lee, 'Design and modeling of RF MEMS tunable capacitors using electrothermal actuators', in 1999 IEEE MTT-S International Microwave Digest, pp 1507-1510, 1999
- C. L. Goldsmith, A. Malczewski, Z. J. Yao, S. Chen, J. Ehmke, and D. H. Hinzel, 'RF MEMS variable capacitors for tunable filters', International Journal of RF & Microwave Computer-Aided Engineering, 9, 4, pp. 362-374, 1999 https://doi.org/10.1002/(SICI)1099-047X(199907)9:4<362::AID-MMCE7>3.0.CO;2-H
- I. J. Yao, S. Park, and J. DeNatale, 'High tunning-ratio MEMS-based tunable capacitors for RF communications applications', in Proceedings of 1998 SoIid-State Sensor and Actuator Workshop, Hilton Head Island, pp. 124-127, 1998
- E. Hung, and S. Senturia, 'Tunable capacitors with programmable capacitance-voltage characteristics', in Proceedings of 1998 Solid-State Sensor and Actuator Workshop, Hilton HeadIsland, pp. 292-295, 1998
- C.T.-C. Nguyen, 'Frequency-selective MEMS for miniaturized communication devices', in 1998 IEEE Aerospace Conference, 1, 44s-460, 1998
- F. D. Bannon, III, J. R. Clark, and C.T.-C. Nguyen, 'High frequency microelectromecha-nical IF filters', in 1996 International Electron Devices Meeting, pp. 773-776, 1996
- J. R. Clark, F. D. Bannon, III, A. C. Wong, and C. T. C. Nguyen, 'Parallel-resonator HF micromechanical bandpass filters', in Proceedings of 19971nternational Conference on SoIid-State Sensor and Actuators, Chicago, pp. 1161-1164, 1997
- Choong-Mo Nam and Young-Se Kwon, 'Highperformance planar inductor on thick oxidized porous silicon (OPS) substrate', IEEE Microwave and Guided Wave Letters, vol. 7, Issue 8, pp. 236-238, Aug. 1997 https://doi.org/10.1109/75.605489
- J. Y. C. Chang, A. A. Abidi and M. Gaitan, 'Large suspended inductors on silicon and their use in a 2-um CMOS RF amplifier', IEEE Electron Device Letters, vol. 14 Issue 5, pp.246-248, May 1993 https://doi.org/10.1109/55.215182
- Chen-Yu Chi, 'Planar microwave and milli-meter-wave lumped elements and coupled line filters using micro-machining techniques', IEEE Trans. MTT, vol. 43, no. 4, April 1995
- P. Blondy, A. R. Brown, D. Cros, and G. M. Rebeiz, 'Low-loss micromachined filters for millimeter-wave communication systems', IEEE Transactions on Microwave Theory and Techniques, 46, 12, pp. 2283-2288, 1998 https://doi.org/10.1109/22.739212
- R. Ruby, P. Bradley, J. D. Larson III and Y. Oshmyansky, 'PCS 1900 MHz duplexer using' thin film bulk acoustic resonators (FBARs)', Electronics letters 13th, vol. 35, no. 10, pp. 794-795, May 1999 https://doi.org/10.1049/el:19990559
- S. V. Krishnaswamy, J. F. Rosenbaum, S. S. Horwitz, and R. A. Moore, 'Film bulk acoustic wave resonator and filter technology', IEEE MTT-S. Dig., pp. 153-155, 1992
- L. P. B. Katehi, and G. M. Rebeiz, 'Novel micromachined approaches to MMICs using low-parasitic, high-performance transmission media and environments', in 1996 1EEE MTT-S International Microwave Symposium Disest, 1145-1148, 1996
- B. Pillans, S. Eshelman, A. Malczewski, J. Ehmke, and C. Goldsmith, 'Ka-band RF MEMS phase shifters', IEEE Microwave and Guided Wave Letters, 9, 12. pp. 520-522, December 1999 https://doi.org/10.1109/75.819418
- J. S. Harden, and G. M. Rebeiz, 'One-and two-bit low-loss cascadable MEMS distributed X-band phase shifters', in 2000 IEEE MTT-S International Microwave Symposium Digest, pp. 161-164, 2000
- A. Dec, and K. Suyarna, 'A 2.4 GHz CMOS LC VCO using micromachined variable capacitors for frequency tuning', in 1999 IEEE MTT-S International Microwave Symposium Disest, 1, pp. 78-82, 1999
- http://www.hitachi-meta1s.co.jp/isc2001 /mw/mw.html
- http://www.microsystem.re.kr
- http://www.raytheon.com
- http://www.ll.mit.edu/
- http://eecs.umich.edu
- http://www.hrl.com
- http://www.sri.com/
- http://www.uiuc.edu
- http://www.rockwell.com
- http://www.sandia.gov/Main.html
- http://www.berkeley.edu
- http://www.ucla.com
- http://www.motorola.com
- http://www.ericsson.com
- http://www.cep.tntech.edu/mems/index.html
- http://www.analog.com/technology/mems/index
- http://www.cornell.edu/
- http://iml.kaist.ac.kr
- http://www.dowkey.com/
- http://plaza.snu.ac.kr/~micro/
- http://www.memscap.com
- http://www.rnemsrus.com
- http://www.coventor.com
- http://www.nec.co.jp/
- http://www.nec.co.jp/
- http://www.sait.samsung.co.kr
- http://www.lg-elite.com
- C. Goldsmith, T. H. Lin, B. Powers, R. W. Wen, and B. Norvell, 'Micromechanical mem-brane switches for microwave applications', in IEEE Microwuve Theory Tech. Symp., vol. 1, pp. 9194, May 1995
- C. Goldsmith, J. Randall, S. Kshelman, T. H. Lin, D. Denniston, S. Chen, and B. Norvell, 'Characteristics of micromachined switches at microwave frequencies', in IEEE Microwave Theoiy Tech. Symp., vol. 2, pp. 1141-1144, June 1996
- L. Charles Goldsmith, Xhimin Yao, Susan Eshelman, and David Denniston, 'Performance of Low-Loss RF MEMS Capacitive Switches, IEEE', Microwave and guided wave letters, vol. 8, no. 8, 269-271, August 1998 https://doi.org/10.1109/75.704410
- Shifang Zhou, Xi-Qing Sun and W. N. Carr, 'A micro variable inductor chip using MEMS relays', Solid Stute Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on, vol. 2, pp. 1137-1140, 1997
- Xi-Qing Sun, K. R. Farmer, and W. N. Carr, 'A bistable microrelay based on two-segment multimorph cantilever actuators', Micro Electro Mechanical Sy stems, 199S. MEMS 9K. Proceedings., The Eteventh Anntial International Workshop, pp.154-159, 1998
- A. C. Lmhoff, 'Packaging technology for RFICs: current status and future trends', 1999 IEEE Radio Frequency Integrated Circuits (RFIC) Symposium, pp. 7-10, 1999
- Yun-Kwon Park, Heung-Woo Park, Duck-Jung Lee, Jung-Ho Park, In-Sang Song, Chung-Woo Kim; Ci-Moo Song, Yun-Hi Lee, Chul-Ju Kim ,and Byeong-Kwon Ju, 'A novel low-loss wafer-level packaging of the RF-MEMS devices', Micro Electro Mechanical Systems, 2001. The fifteenth IEEE International Conference, pp. 681-684, 2002
- J. J. Yao and M. F. Chang, 'A surface micromachined miniature switch for telecommunication applications with signal Irequencies from DC up to 4 GHz', in Transducers'95, pp 384-387
- Ye Wang, Zhihong Li, Daniel T. McCormick and Norman C Tien, 'Low-voltage lateral-contact microrelays for RF applications', in Micm Electro Mechanical Systems, 2001. The fifteenth IEEE International Conference, pp. 645-648, 2002
- E. J. J. Kruglick, and K. S. J. Pister, 'Lateral MEMS microcontact considerations', in Microelectromechanical Systems, Journal of, vol. 8, Issue 3, pp. 264-271, Sep. 1999 https://doi.org/10.1109/84.788630