Journal of Korean Institute of Industrial Engineers (대한산업공학회지)

Korean Institute of Industrial Engineers (대한산업공학회)
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A Milestone Generation Algorithm for Efficient Control of FAB Process in a Semiconductor Factory

반도체 FAB 공정의 효율적인 통제를 위한 생산 기준점 산출 알고리듬

  • Baek, Jong-Kwan (Research Institute for Information and Communication Technology, Korea University) ;
  • Baek, Jun-Geol (Department of industrial System Engineering, Induk Institute of Technology) ;
  • Kim, Sung-Shick (Department of industrial Systems and Information Engineering, Korea University)
  • 백종관 (고려대학교 정보통신기술공동연구소) ;
  • 백준걸 (인덕대학 산업시스템경영과) ;
  • 김성식 (고려대학교 산업시스템정보공학과)
  • Published : 2002.12.31
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Abstract

Semiconductor manufacturing has been emerged as a highly competitive but profitable business. Accordingly it becomes very important for semiconductor manufacturing companies to meet customer demands at the right time, in order to keep the leading edge in the world market. However, due-date oriented production is very difficult task because of the complex job flows with highly resource conflicts in fabrication shop called FAB. Due to its cyclic manufacturing feature of products, to be completed, a semiconductor product is processed repeatedly as many times as the number of the product manufacturing cycles in FAB, and FAB processes of individual manufacturing cycles are composed with similar but not identical unit processes. In this paper, we propose a production scheduling and control scheme that is designed specifically for semiconductor scheduling environment (FAB). The proposed scheme consists of three modules: simulation module, cycle due-date estimation module, and dispatching module. The fundamental idea of the scheduler is to introduce the due-date for each cycle of job, with which the complex job flows in FAB can be controlled through a simple scheduling rule such as the minimum slack rule, such that the customer due-dates are maximally satisfied. Through detailed simulation, the performance of a cycle due-date based scheduler has been verified.

Keywords

References

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